Design and implementation of a miniature polymer ball bearing slide table

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 229-232

  Lee, Chih Chun ^a   Hsiao, Wen Hsiung ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL PLANES; FABRICATION PROCESS; IN-SITU; LINEAR SLIDE; LIQUID POLYMERS; MAGNETIC FORCE; NOVEL DESIGN; SELF-ASSEMBLED; SILICON (111); UV-CURING; V-SHAPE; WET ANISOTROPIC ETCHING;

HOUSING; LIQUIDS; MECHANICAL ENGINEERING; MECHANICS; MEMS; POLYMERS; REACTIVE ION ETCHING; SILICON WAFERS; SPHERES;

BALL BEARINGS;

EID: 79953805363     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734403     Document Type: Conference Paper

References (9)

1. L.-S. Fan, Y.-C. Tai, and R. S. Muller, "IC-processed electrostatic micro-motors," International Electron Devices Meeting, 1988, p. 666.
2. L.-S. Fan, Y.-C. Tai, and R. S. Muller, "Integrated movable micromechanical structures for sensors and actuators," IEEE Trans. on Electron Devices, 35, p. 724, 1988.
3. M. Mehregany, K. J. Gabriel, and W. S. N. Trimmer, "Integrated fabrication of polysilicon mechanisms," IEEE Trans. on Electron Devices, 35, p. 719 1988.
4. B. K. Smith, C. D. Brown, G. L. Vigne, and J. J. Sniegowski, "Thin Teflon-like films for MEMS: film properties and reliability studies," Proc. of SPIE, Santa Clara, CA, USA, 1998, p. 114.
5. D.-S. Lim, J.-W. An, and H. J. Lee, "Effect of carbon nanotube addition on the tribological behavior of carbon/carbon composites," Wear, 252, 2002, p. 512.
6. C. M. Waits, B. Geil, and R. Ghodssi, "Encapsulated ball bearings for rotary micro machines," Journal of Micromechanics and Microeng., 17, 2007, p. S224.
7. R. Hergert, Ingrid S.Y. Ku, T. Reddyhoff, and A. S. Holmes, "Micro rotary ball bearing with integrated ball cage: Fabrication and characterization," IEEE MEMS 2010, Hong Kong, 2010, p. 687.
8. N. Ghalichechian, A. Modafe, J. H. Lang, and R. Ghodssi, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings," Sensors and Actuators A: Physical, 136, p. 496, 2007.
9. C.-C. Lee, S.-Y. Hsiao, and W. Fang, "Implementation of a micro ball lens on a silicon optical bench using insoluble two-phase liquid immersion technology," Journal of Micromechanics and Microeng., 20, p. 085015, 2010.