Millimeter-scale traveling wave rotary ultrasonic motors

Journal of Microelectromechanical Systems

Volumn 24, Issue 1, 2015, Pages 108-114

  Rudy, Ryan Q ^a,b   Smith, Gabriel L ^a   DeVoe, Don L ^b   Polcawich, Ronald G ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Micromotors; piezoelectric films; PZT ceramics; traveling wave devices

Indexed keywords

ELECTROMECHANICAL DEVICES; FERROELECTRIC CERAMICS; MEMS; MICROMOTORS; MOTORS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MOTORS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; ULTRASONIC EQUIPMENT; ULTRASONIC MACHINE TOOLS;

FREQUENCY CHARACTERIZATION; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC FILM; PIEZOELECTRIC RESPONSE; PZT CERAMICS; TRAVELING WAVE DEVICES; TRAVELING WAVE ROTARY ULTRASONIC MOTOR; TRAVELING WAVE ULTRASONIC MOTOR;

ELECTRIC DRIVES;

EID: 84922375914     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2317778     Document Type: Article

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