Measurement and modeling of dynamic rolling friction in linear microball bearings

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 128, Issue 4, 2006, Pages 891-898

  Tan, Xiaobo ^a   Modafe, Alireza ^b   Ghodssi, Reza ^b  

^a Michigan State University   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BALL-GROOVE INTERACTION; MICROBALL BEARINGS; PLAIN DIFFERENCE METHODS;

ALGORITHMS; COMPUTER SIMULATION; FRICTION; MICROMACHINING; TRIBOLOGY; VISCOELASTICITY;

ROLLER BEARINGS;

EID: 33845938537     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2362786     Document Type: Article

References (31)

1. Mehregany, M., Gabriel, K. I., and Trimmer, W. S. N., 1988, "Integrated Fabrication of Polysilicon Mechanisms," IEEE Trans. Electron Devices, 35, pp. 719-723.
2. Kumar, S., and Cho, D., 1990, "A Proposal for Electrically Levitating Micromotors," Sens. Actuators, A, 24, pp. 141-149.
3. Frechette, L., Nagle, S. F., Ghodssi, R., Umans, S. D., Schmidt, M. A., and Lang, J. H., 2001, "An Electrostatic Induction Micromotor Supported on Gas-Lubricated Bearings," in Proceedings of the 14th Annual IEEE International Conference on Microelectromechanical Systems, August 24-26, Berkeley, CA, pp. 290-293.
4. Bhushan, B., Israelachvill, J. N., and Landman, U., 1995, "Nanotribology: Friction, Wear and Lubrication at the Atomic Scale," Nature (London), 374, pp. 607-616.
5. Sundararajan, S., and Bhushan, B., 2001, "Static Friction and Surface Roughness Studies of Surface Micromachined Electrostatic Micromotors Using an Atomic Force/Friction Force Microscope," J. Vac. Sci. Technol. A, 19, pp. 1777-1785.
6. Prasad, R., MacDonald, N., and Taylor, D., 1995, "Micro- instrumentation for Tribological Measurement," in Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, June 25-29, Stockholm, Sweden, pp. 52-55.
7. Miller, S. L., Sniegowski, J. J., LaVigne, G., and McWhorter, P. J., 1996, "Friction in Surface-Micromachined Microengines," in Smart Structures and Materials 1996: Smart Electronics and MEMS, February 26-28, San Diego, CA, Proc. SPIE, 2722, pp. 197-204.
8. Tas, N. R., Gui, C., and Elwenspoek, M., 2000, "Static Friction in Elastic Adhesive MEMS Contacts, Models and Experiment," in Proceedings of the IEEE 13th Annual International Conference on Microelectromechanical Systems, January 23-27, Miyazaki, Japan, pp. 193-198.
9. Corwin, A. D., and de Boer, M. P., 2004, "Effect of Adhesion on Dynamic and Static Friction in Surface Micromachining," Appl. Phys. Lett., 84, pp. 2451-2453.
10. Ghodssi, R., Denton, D. D., Seireg, A. A., and Howland, B., 1993, "Rolling Friction in a Linear Microstructure," J. Vac. Sci. Technol. A, 11, pp. 803-807.
11. Lin, T.-W., Modafe, A., Shapiro, B., and Ghodssi, R., 2004, "Characterization of Dynamic Friction in MEMS-based Microball Bearings," IEEE Trans. Instrum. Meas., 53(3), pp. 839-846.
12. Tan, X., Modafe, A., Hergert, R., Ghalichechian, N., Shapiro, B., Baras, J. S., and Ghodssi, R., 2004, "Vision-Based Microtribological Characterization of Linear Microball Bearings," in Proceedings of ASME/STLE International Joint. Tribology Conference, October 24-27, Long Beach, CA, Paper No. TRIB2004-64334.
13. Leonard, N., and Krishnaprasad, P. S., 1992, "Adaptive Friction Compensation for Bidirectional Low Velocity Tracking," in Proceedings of the 31st IEEE Conference on Decision and Control, December 16-18, Tucson, AZ, pp. 267-273.
14. Armstrong-Helouvry, B., Dupont, P., and de Wit, C. C., 1994, "A Survey of Models, Analysis Tools and Compensation Methods for the Control of Machines With Friction," Automatica, 30(7), pp. 1083-1138.
15. Dahl, P. R., 1968, "A Solid Friction Model," Tech. Rep. No. TOR-158 (3107-18), The Aerospace Corporation, El Segundo, CA.
16. Swevers, J., Al-Bender, F., Ganseman, C. G., and Prajogo, T., 2000, "An Integrated Friction Model Structure With Improved Presliding Behavior for Accurate Friction Compensation," IEEE Trans. Autom, Control, 45(4), pp. 675-686.
17. de Wit, C. C., Olsson, H., Astrom, K. J., and Lischinsky, P., 1995, "A New Model for Control of Systems With Friction," IEEE Trans. Autom. Control, 40(3), pp. 419-425.
18. Dupont, P., Hayward, V., Armstrong, B., and Altpeter, F., 2002, "Single State Elasto-Plastic Friction Models," IEEE Trans. Autom. Control, 47(5), pp. 787-792.
19. Hess, D. P., and Soom, A., 1990, "Friction at a Lubricated Line Contact Operating at Oscillating Sliding Velocities," ASME J. Tribol., 112, pp. 147-152.
20. Liang, J. W., and Feeny, B. F., 1998, "Dynamical Friction Behavior in a Forced Oscillator With a Compliant Contact," Trans. ASME, J. Appl. Mech., 65, pp. 250-257.
21. Wu, B., Bao, H., Ou, J., and Tian, S., 2005, "Stability and Accuracy Analysis of the Central Difference Method for Real-Time Substructure Testing," Earth-quake Eng. Struct. Dyn., 34, pp. 705-718.
22. Fornberg, B., 1998, "Calculation of Weights in Finite Difference Formulas," SIAM Rev., 40(3), pp. 685-691.
23. Khan, I. R., and Ohba, R., 1999, "Closed-Form Expressions for the Finite Difference Approximations of First and Higher Derivatives Based on Taylor Series," J. Comput. Appl. Math., 107, pp. 179-193.
24. Greenwood, J. A., Minshall, H., and Tabor, D., 1961, "Hysteresis Losses in Rolling and Sliding Friction," Proc. R. Soc. London, Ser. A, 259, pp. 480-507.
25. Johnson, K. L., 1985, Contact Mechanics, Cambridge U. P., Cambridge.
26. Kalker, J. J., 1990, Three-Dimensional Elastic Bodies in Rolling Contact, Kluwer Academic, Dordrecht.
27. Jiang, Y., Xu, B., and Sehitoglu, H., 2002, "Three-Dimensional Elastic-Plastic Stress Analysis of Rolling Contact," ASME J. Tribol., 124, pp. 699-708.
28. Poschel, T., Schwager, T., and Brilliantov, N. V., 1999, "Rolling Friction of a Hard Cylinder on a Viscous Plane," Eur. Phys. J. B, 10, pp. 169-174.
29. Peterson, K. E., 1982, "Silicon as a Mechanical Material," Proc. IEEE, 70(5), pp. 420-457.
30. Smart, D. R., 1974, Fixed Point Theorems, Cambridge U. P., London.
31. Modafe, A., Ghalichechian, N., Frey, A., Lang, J. H., and Ghodssi, R., 2005, "A Microball-Bearing-Supported Linear Electrostatic Micromotor With Benzocyclobutene Polymer Insulating Layers," in Proceedings of the 13th International Conference on Solid-State Sensors, Actuators, and Microsystems, June 5-9, Seoul, South Korea, pp. 693-696.