MEMS reliability: Where are we now?

Microelectronics Reliability

Volumn 49, Issue 9-11, 2009, Pages 937-940

  Tanner, D M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLE COUNT; EMERGING APPLICATIONS; HYDROCARBON CONTAMINATION; INERTIAL SENSOR; INK JET; MEMS RELIABILITY; MICROMIRROR ARRAY; PACKAGING TECHNIQUES; PRINT HEAD; RELIABILITY TECHNIQUES; RF SWITCH;

HYDROCARBONS; MEMS; MICROELECTROMECHANICAL DEVICES; PRODUCT DEVELOPMENT; PROJECT MANAGEMENT; SENSORS;

RELIABILITY;

EID: 69249206588     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2009.06.014     Document Type: Article

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