An industrial and applied review of new MEMS devices features

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1341-1344

  Tanaka, Masako ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

Accelerometer; Gyro sensor; Noise; Parasitic effect; Resonator; Si MEMS; Zero drift

Indexed keywords

ACCELEROMETERS; DIGITAL CAMERAS; JITTER; MOBILE DEVICES; PIEZOELECTRIC DEVICES; RESONATORS; SENSOR NETWORKS; SPURIOUS SIGNAL NOISE;

GYRO SENSORS; PARASITIC EFFECTS; SI-MEMS; ZERO DRIFT;

MEMS;

EID: 34247644886     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.232     Document Type: Article

References (6)

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3. Tam Harbert, Electronic Business, MEMS Market in the world, 1 April, 2005.
4. 2006 Press Releases from analog devices, 31st October, 2005.
5. News Release 2006 from Hitachi metals, 23rd August, 2006.
6. Babak V. Amini, Siavash Pourkamali, Farrokh Ayazi, in: Proceedings of IEEE MEMS 2004, pp. 572-575.