THERMAL CONDUCTION IN SILICON MICRO- AND NANOSTRUCTURES

Annual Review of Heat Transfer

Volumn 14, Issue , 2005, Pages 129-168

  McConnell, A D ^a   Goodson, K E ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL IMPURITIES; ETCHING; GRAIN BOUNDARIES; METALLIC FILMS; NANOSTRUCTURES; PHONONS; POLYCRYSTALLINE MATERIALS; POLYSILICON; ROOM TEMPERATURE; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; THERMAL CONDUCTIVITY OF SOLIDS;

CONDUCTION PROCESS; INTEGRATED ACTUATOR; INTEGRATED SENSORS; MICRO AND NANOSTRUCTURES; PERFORMANCE AND RELIABILITIES; SENSORS AND ACTUATORS; SILICON FILMS; SILICON MICROSTRUCTURES; SILICON NANO STRUCTURE (SINS); THERMAL CONDUCTION;

HEAT CONDUCTION;

EID: 84934941228     PISSN: 10490787     EISSN: 23750294     Source Type: Book Series    
DOI: 10.1615/AnnualRevHeatTransfer.v14.120     Document Type: Chapter

References (100)

1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors, http://public.itrs.net, 2001.
2. K. E.Goodson, M. I. Flik, L. T. Su, and D. A. Antoniadis, Prediction and Measurement of Temperature Fields in Silicon-on-Insulator Electronic Circuits, J. Heat Transfer, Vol. 117, pp. 574–581, 1995.
3. P. G. Sverdrup, Y. S. Ju, and K. E. Goodson, Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors, J. Heat Transfer, Vol. 123, pp. 130–137, 2001.
4. S. M. Sze, VLSI Technology, McGraw-Hill, New York, 1988.
5. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M. A. Lantz, H. E. Rothuizen, R. Stutz, and G. K. Binnig, The Millipede: Nanotechnology Entering Data Storage, IEEE Trans. Nanotechnol., Vol. 1, pp. 39–55, 2002.
6. L. Jiang, M. Wong, and Y. Zohar, Micromachined Polycrystalline Thin Film Temperature Sensors, Measurement Sci. Technol., Vol. 10, pp. 653–664, 1999.
7. C. J. Glassbrenner and G. A. Slack, Thermal Conductivity of Silicon and Germanium from 3 K to the Melting Point, Phys. Rev., Vol. 134, pp. A1058–A1069, 1964.
8. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and P. G. Klemens, Thermal Conductivity of Metallic Elements and Alloys, IFI/Plenum, New York, Vol. 1, 1970.
9. P. G. Klemens, The Thermal Conductivity of Dielectric Solids at Low Temperatures, Proc. Roy. Soc. London, Ser. A, Vol. 208, pp. 108–133, 1951.
10. J. Callaway, Model for Lattice Thermal Conductivity at Low Temperatures, Phys. Rev., Vol. 113, pp. 1046–1051, 1959.
11. M. G. Holland, Analysis of Lattice Thermal Conductivity, Phys. Rev., Vol. 132, pp. 2461–2471, 1963.
12. M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, and S. S. Wong, Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates, J. Heat Transfer, Vol. 120, pp. 30–36, 1998.
13. Y. S. Ju and K. E. Goodson, Phonon Scattering in Silicon Films with Thickness of Order 100 nm, Appl. Phys. Lett., Vol. 74, pp. 3005–3007, 1999.
14. M. Asheghi, K. Kurabayashi, R. Kasnavi, and K. E. Goodson, Thermal Conduction in Doped Single-Crystal Silicon Films, J. Appl. Phys., Vol. 91, pp. 5079–5088, 2002.
15. F. Völklein, Characterization of the Thermal Properties of Bulk and Thin-Film Materials by Using Diagnostic Microstructures, in: Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft University of Technology, Delft, the Netherlands, 2000.
16. M. von Arx, O. Paul, and H. Baltes, Process-Dependent Thin-Film Thermal Conductivities for Thermal CMOS MEMS, J. Microelectromech. Sys., Vol. 9, pp. 136–145, 2000.
17. S. Uma, A. D. McConnell, M. Asheghi, K. Kurabayashi, and K. E. Goodson, Temperature Dependent Thermal Conductivity of Undoped Polycrystalline Silicon, Int. J. Thermophys., Vol. 22, pp. 605–616, 2001.
18. A. D. McConnell, S. Uma, and K. E. Goodson, Thermal Conductivity of Doped Polysilicon Layers, J. Microelectromech. Sys., Vol. 10, pp. 360–369, 2001.
19. A. Balandin and K. L. Wang, Significant Decrease of the Lattice Thermal Conductivity due to Phonon Confinement in a Free-Standing Semiconductor Quantum Well, Phys. Rev. B, Vol. 58, pp. 1544–1549, 1998.
20. P. G. Sverdrup, S. Sinha, M. Asheghi, S. Uma, and K. E. Goodson, Measurement of Ballistic Phonon Conduction near Hotspots in Silicon, Appl. Phys. Lett., Vol. 78, pp. 3331–3333, 2001.
21. K. E. Goodson and M. I. Flik, Solid Layer Thermal-Conductivity Measurement Techniques, Appl. Mech. Rev., Vol. 47, pp. 101–112, 1994.
22. S. R. Mirmira and L. S. Fletcher, Review of the Thermal Conductivity of Thin Films, J. Thermophys. Heat Transfer, Vol. 12, pp. 121–131, 1998.
23. D. G. Cahill, K. Goodson, and A. Majumdar, Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures, J. Heat Transfer, Vol. 124, pp. 223–241, 2002.
24. M. Asheghi, Y. K. Leung, S. S. Wong, and K. E. Goodson, Phonon-Boundary Scattering in Thin Silicon Layers, Appl. Phys. Lett., Vol. 71, pp. 1798–1800, 1997.
25. X. Y. Zheng, S. Z. Li, M. Chen, and K. L. Wang, Giant Reduction in Lateral Thermal Conductivity of Thin Nitride/Silicon/Oxide Membrane Measured with a Suspended Micro Structure, in: Micro-Electro-Mechanical Systems (MEMS): Microscale Thermal Phenomena in Electronic Systems, Proc. ASME Int. Mech. Eng. Congr. and Expos., ASME, New York, Vol. 59, pp. 93–98, 1996.
26. M. von Arx, O. Paul, and H. Baltes, Determination of the Heat Capactiy of CMOS Layers for Optimal CMOS Sensor Design, Sens. Actuat. A, Vol. 46–47, pp. 428–431, 1995.
27. O. Paul, M. von Arx, and H. Baltes, Process-Dependent Thermophysical Properties of CMOS IC Thin Films, in: 8th Int. Conf. on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, 1995.
28. O. M. Paul, J. Korvink, and H. Baltes, Determination of the Thermal Conductivity of CMOS IC Polysilicon, Sens. Actuat. A, Vol. 41–42, pp. 161–164, 1994.
29. O. Paul and H. Baltes, Thermal Conductivity of CMOS Materials for the Optimization of Microsensors, J. Micromech. Microeng., Vol. 3, pp. 110–112, 1993.
30. F. Völklein and H. Baltes, A Microstructure for Measurement of Thermal Conductivity of Polysilicon Thin Films, J. Microelectromech. Sys., Vol. 1, pp. 193–196, 1992.
31. Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, Thermal Conductivity of Heavily Doped Low-Pressure Chemical Vapor Depositied Polycrystalline Silicon Films, J. Appl. Phys., Vol. 63, pp. 1442–1447, 1988.
32. Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, Thermal Conductivity of Heavily Doped LPCVD Polysilicon, in: IEDM’87,1987.
33. A. Irace and P. M. Sarro, Measurement of Thermal Conductivity and Diffusivity of Single and Multilayer Membranes, Sens. Actuat. A, Vol. 76, pp. 323–328, 1999.
34. S. Graham, B. Olson, C. Wong, E. Piekos, A. D. McConnell, and K. Goodson, The Effects of Processing Conditions on the Thermal Conductivity of Polycrystalline Silicon Films, in: Proc. IMECE’03, Washington, DC, 2003.
35. D. G. Cahill, Thermal Conductivity Measurement from 30 to 750 K: The 3ω Method, Rev. Sci. Instrum., Vol. 61, pp. 802–808, 1990.
36. Y. S. Ju, K. Kurabayashi, and K. E. Goodson, Thermal Characterization of Anisotropic Thin Dielectric Films Using Harmonic Joule Heating, Thin Solid Films, Vol. 339, pp. 160–164, 1999.
37. K. Kurabayashi, M. Asheghi, M. Touzelbaev, and K. E. Goodson, Measurement of the Thermal Conductivity Anisotropy in Polyimide Films, J. Microelectromech. Sys., Vol. 8, pp. 180–191, 1999.
38. K. E. Goodson and Y. S. Ju, Heat Conduction in Novel Electronic Films, Ann.Rev. Mater. Sci., Vol. 29, pp. 261–293, 1999.
39. L. Wei, M. Vaudin, C. S. Hwang, G. White, J. Xu, and A. J. Steckl, Heat Conduction in Silicon Thin Films: Effect of Microstructure, J. Mater. Res., Vol. 10, pp. 1889–1896, 1995.
40. C. Kittel, Introduction to Solid State Physics, Wiley, New York, 1996.
41. A. Majumdar, Microscale Heat Conduction in Dielectric Thin Films, J. Heat Transfer, Vol. 115, pp. 7–16, 1993.
42. J. D. Plummer, M. D. Deal, and P. B. Griffin, Silicon VLSI Technology: Fundamentals, Practice and Modeling, Prentice Hall, Upper Saddle River, NJ, 2000.
43. G. A. Slack, Thermal Conductivity of Pure and Impure Silicon, Silicon Carbide, and Diamond, J. Appl. Phys., Vol. 35, pp. 3460–3466, 1964.
44. J. M. Ziman, Electrons and Phonons, Oxford University Press, Oxford, UK, 1960.
45. G. P. Srivastava, The Physics of Phonons, Adam Hilger, Bristol, UK, 1990.
46. C. Jacoboni and P. Lugli, The Monte Carlo Method for Semiconductor Device Simulation, Springer-Verlag, New York, 1989.
47. S. Mazumder and A. Majumdar, Monte Carlo Study of Phonon Transport in Solid Thin Films Including Dispersion and Polarization, J. Heat Transfer, Vol. 123, pp. 749–759, 2001.
48. R. B. Peterson, Direct Simulation of Phonon-Mediated Heat Transfer in a Debye Crystal, J. Heat Transfer, Vol. 116, pp. 815–822, 1994.
49. J. E. Parrott, The High Temperature Thermal Conductivity of Semiconductor Alloys, Proc. Phys. Soc., Vol. 81, pp. 726–735, 1963.
50. K. C. Sood and M. K. Roy, Longitudinal Phonons and High-Temperature Heat Conduction in Germanium, J. Phys.: Condensed Matter, Vol. 5, pp. 301–312, 1993.
51. C. M. Bhandari and G. S. Verma, Role of Longitudinal and Transverse Phonons in Lattice Thermal Conductivity of Ga As and In Sb, Phys. Rev., Vol. 140, pp. A2101–A2104, 1965.
52. P. G. Klemens, Theory of Lattice Thermal Conductivity: Role of Low-Frequency Phonons, Int. J. Thermophys., Vol. 2, pp. 55–62, 1981.
53. N. Savvides and H. J. Goldsmid, The Effect of Boundary Scattering on the High-Temperature Thermal Conductivity of Silicon, J. Phys. C: Solid State Phys., Vol. 6, pp. 1701–1708, 1973.
54. T. Klitsner, J. E. van Cleve, H. E. Fischer, and R. O. Pohl, Phonon Radiative Heat Transfer and Surface Scattering, Phys. Rev. B, Vol. 38, pp. 7576–7594, 1988.
55. X. Lu, W. Z. Shen, and J. H. Chu, Size Effect on the Thermal Conductivity of Nanowires, J. Appl. Phys., Vol. 91, pp. 1542–1552, 2002.
56. X. Lu and J. H. Chu, Phonon Heat Transport in Silicon Nanowires, Euro. Phys. J. B, Vol. 26, pp. 375–378, 2002.
57. F. H. Stillinger and T. A. Weber, Computer Simulation of Local Order in Condensed Phases of Silicon, Phys. Rev. B, Vol. 31, pp. 5262–5271, 1985.
58. P. K. Schelling, S. R. Phillpot, and P. Keblinski, Comparison of Atomic-Level Simulation Methods for Computing Thermal Conductivity, Phys. Rev. B, Vol. 65, pp. 144306-1–1444306-12, 2002.
59. S. Volz and G. Chen, Lattice Dynamic Simulation of Silicon Thermal Conductivity, Physica B, Vol. 263–264, pp. 709–712, 1999.
60. S. G. Volz and G. Chen, Molecular-Dynamics Simulation of Thermal Conductivity of Silicon Crystals, Phys. Rev. B, Vol. 61, pp. 2651–2656, 2000.
61. S. G. Volz and G. Chen, Molecular Dynamics Simulation of Thermal Conductivity of Silicon Nanowires, Appl. Phys. Lett., Vol. 75, pp. 2056–2058, 1999.
62. R. D. Mountain and R. A.MacDonald, A Molecular-Dynamics Study of Heat Flow in a Two-Dimensional Crystal, Phys. Rev. B, Vol. 28, pp. 3022–3025, 1983.
63. X. L. Feng, Z. X. Li, and Z. Y. Guo, Size Effect of Lattice Thermal Conductivity Across Nanoscale Thin Films by Molecular Dynamics Simulations, Chinese Phys. Lett., Vol. 18, pp. 416–418, 2001.
64. X. L. Feng, Z. X. Li, X. G. Liang, and Z. Y. Guo, Molecular Dynamics Study on Thermal Conductivity of Nanoscale Thin Films, Chinese Sci. Bull., Vol. 46, pp. 604–607, 2001.
65. J. R. Lukes, D. Y. Li, X.-G. Liang, and C.-L. Tien, Molecular Dynamics Study of Solid Thin-Film Thermal Conductivity, J. Heat Transfer, Vol. 122, pp. 536–543, 2000.
66. P. K. Schelling, S. R. Phillpot, and P. Keblinski, Phonon Wave-Packet Dynamics at Semiconductor Interfaces by Molecular-Dynamics Simulation, Appl. Phys. Lett., Vol. 80, pp. 2484–2486, 2002.
67. N. Savvides and H. J. Goldsmid, Thermal Conductivity of Thin Crystals of Pure Silicon, Phys. Stat. Sol. B, Vol. 63, pp. K89–K91, 1974.
68. X. Y. Yu, L. Zhang, and G. Chen, Thermal-Wave Measurements of Thin-Film Thermal Diffusivity with Different Laser Beam Configurations, Rev. Sci. Instrum., Vol. 67, pp. 2312–2316, 1996.
69. G. Chen and M. Neagu, Thermal Conductivity and Heat Transfer in Superlattices, Appl. Phys. Lett., Vol. 71, pp. 2761–2763, 1997.
70. D. Li, Y. Wu, P. Kim, L. Shi, P. Yang, and A. Majumdar, Thermal Conductivity of Individual Silicon Nanowires, Appl. Phys. Lett., Vol. 83, pp. 2934–2936, 2003.
71. C.-L. Tien and G. Chen, Challenges in Microscale Conductive and Radiative Heat Transfer, J. Heat Transfer, Vol. 116, pp. 799–807, 1994.
72. E. H. Sondheimer, The Mean Free Path of Electrons in Metals, Adv. Phys., Vol. 1, pp. 1–42, 1952.
73. E. T. Swartz and R. O. Pohl, Thermal Boundary Resistance, Rev. Mod. Phys., Vol. 61, pp. 605–668, 1989.
74. Y. S. Ju and K. E. Goodson, Size Effect on Thermal Conduction in Silicon-on-Insulator Devices under Electrostatic Discharge (ESD) Conditions, Jap. J. Appl. Phys., Vol. 36, pp. L798–L800, 1997.
75. N. Mingo, L. Yang, D. Li, and A. Majumdar, Predicting the Thermal Conductivity of Si and Ge Nanowires, Nano Lett., Vol. 3, pp. 1713–1716, 2003.
76. J. Zou and A. Balandin, Phonon Heat Conduction in a Semiconductor Nanowire, J. Appl. Phys., Vol. 89, pp. 2932–2938, 2001.
77. R.-P. Wang, G.-W. Zhou, Y.-L. Liu, S.-H. Pan, H.-Z. Zhang, D.-P. Yu, and Z. Zhang, Raman Spectral Study of Silicon Nanowires: High-Order Scattering and Phonon Confinement Effects, Phys. Rev. B, Vol. 61, pp. 16827–16832, 2000.
78. M. G. Holland and L. J. Neuringer, The Effect of Impurities on the Lattice Thermal Conductivity of Silicon, in: Proc. Int. Conf. on Physics of Semiconductors, Institute of Physics and the Physical Society of London, pp. 474–481, 1962.
79. 2 Interface, J. Appl. Phys., Vol. 87, pp. 2255–2260, 2000.
80. J. M. Ziman, The Effect of Free Electrons on Lattice Conduction, Philos. Mag., Vol. 1, pp. 191–198, 1956.
81. J. M. Ziman, The Effect of Free Electrons on Lattice Conduction, Philos. Mag., Vol. 2, pp. 292, 1957.
82. K. E. Goodson, Thermal Conduction in Nonhomogeneous CVD Diamond Layers in Electronic Microstructures, J. Heat Transfer, Vol. 118, pp. 279–286, 1996.
83. L. Mei, M. Rivier, Y. Kwark, and R. W. Dutton, Grain-Growth Mechanisms in Polysilicon, J. Electrochem. Soc., Vol. 129, pp. 1791–1795, 1982.
84. Y. Wada and S.Nishimatsu, Grain Growth Mechanism of Heavily Phosphorus-Implanted Polycrystalline Silicon, J. Electrochem. Soc., Vol. 125, pp. 1499–1504, 1978.
85. V. P. Lesnikova, A. S. Turtsevich, V. Y. Krasnitsky, V. A. Emelyanov, O. Y. Nalivaiko, S. V. Kravtsov, and T. V.Makarevich, The Structure, Morphology and Resistivity of In Situ Phosphorous Doped Polysilicon Films, Thin Solid Films, Vol. 247, pp. 156–161, 1994.
86. M. Hendriks and C. Mavero, Phosphorus Doped Polysilicon for Double Poly Structures: I. Morphology and Microstructure, J. Electrochem. Soc., Vol. 138, pp. 1466–1470, 1991.
87. E. G. Lee and H. B. Im, Effects of Microstructure and As Doping Concentration on the Electrical Properties of LPCVD Polysilicon, J. Electrochem. Soc., Vol. 138, pp. 3465–3469, 1991.
88. N. G. Nakhodkin and T. V. Rodionova, Formation of Different Types of Polysilicon Film Structures and Their Grain Growth under Annealing, Phys. Stat. Sol. A, Vol. 123, pp. 431–439, 1991.
89. G. Harbeke, L. Krausbauer, E. F. Steigmeier, A. E. Widmer, H. F. Kappert, and G. Neugebauer, Growth and Physical Properties of LPCVD Polycrystalline Silicon Films, J. Electrochem. Soc., Vol. 131, pp. 675–682, 1984.
90. R. Le Bihan, F. Karray, and B. Cambou, Grain Size and Resistivity of Polycrystalline Silicon Films, in: Poly-Micro-Crystalline and Amourphous Semiconductors Symp., Strasbourg, France, 1984.
91. X. Zhang, T.-Y. Zhang, M. Wong, and Y. Zohar, Rapid Thermal Annealing of Polysilicon Thin Films, J. Microelectromech. Sys., Vol. 7, pp. 356–364, 1998.
92. A. Pleschinger, J. Lutz, F. Kuchar, H. Noll, and M. Pippan, A Structural and Topographical Study of Low-Pressure Chemical-Vapor-Deposited Polysilicon by Scanning Probe Microscopy, J. Appl. Phys., Vol. 81, pp. 6749–6753, 1997.
93. M. M. Mandurah, K. C. Saraswat, C. R. Helms, and T. I. Kamins, Dopant Segregation in Polycrystalline Silicon, J. Appl. Phys., Vol. 51, pp. 5755–5763, 1980.
94. C. H. Henager, Jr. and W. T. Pawlewicz, Thermal Conductivity of Thin Sputtered Optical Films, Appl. Opt, Vol. 32, pp. 91–101, 1993.
95. J. E. Graebner, M. E. Reiss, and L. Seibles, Phonon Scattering in Chemical-Vapor-Deposited Diamond, Phys. Rev. B, Vol. 50, pp. 3702–3713, 1994.
96. E. Pop, K. Banerjee, P. Sverdrup, R. Dutton, and K. Goodson, Localized Heating Effects and Scaling of Sub-0.18 Micron CMOS Devices, in: IEDM Tech. Digest, pp. 31.1.1–31.1.4, 2001.
97. K. Fushinobu, A. Majumdar, and K. Hijikata, Heat Generation and Transport in Submicron Semiconductor Devices, J. Heat Transfer, Vol. 117, pp. 25–31, 1995.
98. S. Sinha and K. E. Goodson, Phonon Heat Conduction from Nanoscale Hotspots in Semiconductors, Proc. 12th Int. Heat Transfer Conf., Grenoble, France, pp. 573–578, 2002.
99. G. Dolling, Lattice Vibrations in Crystals with the Diamond Structure, Symp. on Inelastic Scattering of Neutrons in Solids and Liquids, IAEA, Vienna, pp. 37–48, 1963.
100. C. H. Mastrangelo and R. S. Muller, Thermal Diffusivity of Heavily Doped Low Pressure Chemical Vapor Depositied Polycrystalline Silicon Films, Sens. Mater., Vol. 3, pp. 133–142, 1988.