Phonon-boundary scattering in thin silicon layers

Applied Physics Letters

Volumn 71, Issue 13, 1997, Pages 1798-1800

  Asheghi, M ^a   Leung, Y K ^a,b   Wong, S S ^a   Goodson, K E ^a  

^a Stanford University   (United States)

^b CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000864408     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119402     Document Type: Article

References (16)

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