Thermal conduction in nonhomogeneous cvd diamond layers in electronic microstructures

Journal of Heat Transfer

Volumn 118, Issue 2, 1996, Pages 279-286

  Goodson, K E ^a  

^a Stanford University   (United States)

Author keywords

Conduction; Electronic equipment

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COOLING; DEFECTS; DIAMONDS; ELECTRONIC PROPERTIES; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; MICROSTRUCTURE; MULTILAYERS; PHONONS; SCATTERING;

NONHOMOGENEOUS INTERNAL SCATTERING RATE; PEIERLS-BOLTZMANN PHONON TRANSPORT EQUATION; SILICON ON DIAMOND CIRCUITS;

HEAT CONDUCTION;

CHEMICAL; DIAMONDS; ELECTRONIC SYSTEMS; THERMAL CONDUCTIVITY; VAPOUR DEPOSITION;

EID: 0029676410     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2825842     Document Type: Article

References (28)

1. rd IUMRS International Conference on Advanced Materials, Tokyo, Japan, Aug. 31-Sept. 4.
2. Berman, R., 1976, Thermal Conduction in Solids, Oxford University Press, Oxford, United Kingdom, p. 23.
3. Brewster, M. Q., 1992, Thermal Radiative Transfer and Properties, Wiley, New York. Chap. 11, p. 232.
4. Chen, G., and Tien, C. L., 1993, “Thermal Conductivity of Quantum-Well Structures,” J. Thermophysics and Heat Transfer. Vol. 7, pp. 311-318.
5. Flik, M. I., Choi, B. I., and Goodson, K. E., 1992, “Heat Transfer Regimes in Microstructures,” ASME Journal of Heat Transfer, Vol. 114, pp. 666-674.
6. Fuchs, K., 1938, “The Conductivity of Thin Metallic Films According to the Electron Theory of Metals,” Proc. Cambridge Phil. Soc., Vol. 34, pp. 100-108.
7. Goodson, K. E., Flik, M. I., Su, L. T., and Antoniadis, D. A., 1994a, “Prediction and Measurement of the Thermal Conductivity of Amorphous Dielectric Layers,” ASME Journal of Hhat Transfer, Vol. 116, pp. 317-324.
8. Goodson, K. E., Kliding, O. W., and Zachai, R., 1994b, “Thermal Resistances at the Boundaries of CVD Diamond Layers in Electronic Systems,” presented at the ASME Winter Annual Meeting, Chicago, IL, Nov. 11-18.
9. Goodson, K. E., 1995, “Impact of CVD Diamond Layers on the Thermal Engineering of Electronic Systems,” Annual Review of Heat Transfer, Vol. VI, Bcgell House, New York, pp. 323-353.
10. Goodson, K. E., Flik, M. I., Su, L. T., and Antoniadis, D. A., 1995a, “Prediction and Measurement of Temperature Fields in Silicon-on-Insulator Electronic Circuits,” ASME Journal of Heat Transfer, Vol. 117, pp. 574-581.
11. Goodson, K. E., Küding, O. W., Rösler, M., and Zachai, R., 1995b, “Experimental Investigation of Thermal Conduction Normal to Diamond-Silicon Boundaries,” J. Appl. Phys„ Vol. 77, pp. 1385-1392.
12. Goodson, K. E., Kurabayashi, K., and Pease, R. F. W., 1995c, “Improved Heat Sinking for Laser-Diode Arrays Using Microchannels in CVD Diamond,” Proceedings of the ASME National Heat Transfer Conference, Portland, OR, Aug. 5-9, S. S. Sadhal et al., eds., Vol. 3, pp. 187-192.
13. Graebner, J. E., Jin, S., Kammlott, G. W., Herb, J. A., and Gardinicr, C. F., 1992a, “Unusually High Thermal Conductivity in Diumond Films,” Appl. Phys. Lett., Vol. 60, pp. 1576-1578.
14. Graebner, J. E., Mucha, J. A., Seibles, L., and Kammlott, G. W., 1992b, “The Thermal Conductivity of Chemical-Vapor-Deposited Diamond Films on Silicon,” J. Appl. Phys., Vol. 71, pp. 3143-3146.
15. Graebner, J. E., 1993, “Thermal Conductivity of CVD Diamond: Techniques and Results,” Diamond Films and Technology. Vol. 3, pp. 77-130.
16. Heatherington, A. V., Wort, C. J. H., and Southworth, P., 1990, “Crystalline Perfection of Chemical Vapor Deposited Diamond Films,” J. Materials Research, Vol. 5, pp. 1591-1594.
17. Joshi, A. A., and Majumdar, A., 1993, “Transient Ballistic and Diffusive Phonon Heat Transport in Thin Films,” J. Appl. Phys., Vol. 74, pp. 31—39.
18. Kading, O. W., Matthias, E., Zachai, R., Fuber, H. J., and Munziger, P. 1993, “Thermal Diffusivities of Thin Diamond Films on Silicon,” Diamond and Related Materials. Vol. 2, pp. 1185-1190.
19. Kiiding, O. W., Rdsler, M., Zachai, R., and Fuber, H.-J., 1994, “Lateral Thermal Diffusivity of Epitaxial Diamond Filins,” Diamond and Related Materials, Vol. 3. pp. 1175-1182.
20. Majumdar, A., 1993, “Microscale Heat Conduction in Dielectric Thin Films,” ASME Journal of Hf.at Transfer, Vol. 115, p. 7.
21. Morelli, D. T., Uher, C., and Robinson, C. J., 1993, “Transmission of Phonons Through Grain Boundaries in Diamond Films,” Appl. Phys. Intt., Vol. 62. pp. 1085-1087.
22. Peierls, R. E., 1955, Quantum Theory of Solids, Oxford University Press, New York, Chaps. 1 and 2.
23. Plainann, K., Fournier, D., Anger, E., and Gicquel, A., 1994, “Photothermal Examination of the Heat Diffusion Inhomogcncity in Diamond Films of Submicron Thickness," Diamond and Related Materials, Vol. 3, pp. 752-756.
24. Ravi, K. V., and Landstrass, M. I., 1989, “Silicon on Insulator Technology Using CVD Diamond,” Proceedings of the First International Symposium on Diamond and Diamond-Uke Films, J. P. Dismukes et al., eds., The Electrochemical Society. Pennington. NJ, pp. 24-37.
25. Rosier, M., Zachai, R., FUBer, H.-J., Jiang, X., and Klages, C.-P., 1993, “Structural Properties of Hctcrocpitaxial Diamond on Silicon,” Proceedings of the 2nd International Conference on the Applications of Diamond Films and Related Materials, M. Yoshikawa et al., eds., MYU Press, Tokyo, Japan, pp. 691-696.
26. Sondheimcr, E. H., 1952, “The Mean Free Path of Electrons in Metals,” Advances in Physics, Vol. 1, pp. 1-42.
27. Stoner, B. R., Ma, G.-H. M., Woltcr, S. D., and Glass, J. T., 1992, “Characterization of Bias-Enhanced Nucleation of Diamond on Silicon by in Vacuo Surface Analysis and Transmission Electron Microscopy,” Phys. Rev. B, Vol. 45, pp. 11067-11084.
28. Swartz, E. T., and Pohl, R. O., 1989, “Thermal Boundary Resistance,” Rev. Mod. Phys., Vol. 61, pp. 605-668.