Temperature-dependent thermal conductivity of single-crystal silicon layers in soi substrates

Journal of Heat Transfer

Volumn 120, Issue 1, 1998, Pages 30-36

  Asheghi, M ^a   Touzelbaev, M N ^a   Goodson, K E ^a   Leung, Y K ^a   Wong, S S ^a  

^a Stanford University   (United States)

Author keywords

Conduction; Measurement techniques; Thermophysical properties

Indexed keywords

COMPUTER SIMULATION; CRYSTAL STRUCTURE; DATA REDUCTION; ELECTROSTATICS; LATTICE VIBRATIONS; PHONONS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; TRANSISTORS;

BOND AND ETCH BACK TECHNOLOGY; PHONON TRANSPORT ANALYSIS;

HEAT CONDUCTION;

EID: 0031998367     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2830059     Document Type: Article

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