Measurement of the thermal conductivity anisotropy in polyimide films

Journal of Microelectromechanical Systems

Volumn 8, Issue 2, 1999, Pages 180-191

  Kurabayashi, Katsuo ^a   Asheghi, Mehdi ^a   Touzelbaev, Maxat ^a   Goodson, Kenneth E ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; INTEGRATED CIRCUIT MANUFACTURE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYIMIDES; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL VARIABLES MEASUREMENT;

CILIARY ARRAYS; ELECTRICAL RESISTANCE THERMOMETRY; JOULE HEATING; POLYIMIDE FILMS;

PLASTIC FILMS;

EID: 0033148699     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.767114     Document Type: Article

References (47)

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