Giant reduction in lateral thermal conductivity of thin nitride/silicon/oxide membrane measured with a suspended micro structure

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 93-98

  Zheng, X Y ^a   Li, S Z ^a,b   Chen, M ^a   Wang, K L ^a  

^a University of California   (United States)

^b Cirrus Logic Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; EQUIVALENT CIRCUITS; METALLOGRAPHIC MICROSTRUCTURE; SEMICONDUCTING SILICON COMPOUNDS; THERMAL CONDUCTIVITY OF SOLIDS;

SMALL SIGNAL DIFFERENTIAL METHOD; THERMAL BRIDGE;

SEMICONDUCTING FILMS;

EID: 0030371418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)

1. M. I. Flik, B. I. Choi, and K. E. Goodson, 1992, "Heat Transfer Regimes in Microstructures," ASME Journal of Heat Transfer, Vol. 114, pp. 666-674 C. L. Tien, and G. Chen, 1992, "Challenges in Microscale conductive and Radiative Heat Transfer," ASME Journal of Heat Transfer, Vol. 116, pp. 799-807
2. M. I. Flik, B. I. Choi, and K. E. Goodson, 1992, "Heat Transfer Regimes in Microstructures," ASME Journal of Heat Transfer, Vol. 114, pp. 666-674 C. L. Tien, and G. Chen, 1992, "Challenges in Microscale conductive and Radiative Heat Transfer," ASME Journal of Heat Transfer, Vol. 116, pp. 799-807
3. A. Majumdar, 1991, "Microscale Heat Conduction in Dielectric Thin Films," ASME Journal of Heat transfer, vol. 113, pp. 797-807
4. K. E. Goodson, M. I. Flik, L. T. Su, and D. A. Antoniadis, 1995, "Prediction and Measurement of Temperature Fields in Silicon-on-Insulator Electronic Circuits," ASME Journal of Heat transfer, vol. 117, pp. 574-581
5. G. Chen, and C. L. Tien, 1993, "Thermal Conductivities of Quantum Structures," Journal of Thermophysics and Heat Transfer, Vol. 7, pp. 311-318