Micromachined polycrystalline thin film temperature sensors

Measurement Science and Technology

Volumn 10, Issue 8, 1999, Pages 653-664

  Jiang, Linan ^a   Wong, Man ^a   Zohar, Yitshak ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Integrated microsystems; Polycrystalline semiconductors; Temperature microsensors; Thermoresistors

Indexed keywords

MICROMACHINING; MICROSENSORS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; THERMISTORS; THIN FILMS;

POLYCRYSTALLINE SEMICONDUCTORS; THERMORESISTORS;

TEMPERATURE MEASUREMENT;

EID: 0033293532     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/8/301     Document Type: Article

References (15)

1. Blackwelder R F 1981 Hot-wire and hot-film anemometers Methods of Experimental Physics: Fluid Dynamics vol 18, ed R J Emrich (New York: Academic) part A
2. Churchill S W and Bernstein M 1977 A correlating equation for forced convection from gases and liquids to a circular cylinder in crossflow J. Heat Transfer Trans. ASME 94 300-6
3. Gardner J W 1994 Microsensors: Principles and Applications (Chichester: Wiley)
4. Ho C M, Tung S, Lee J B, Tai Y C, Jiang F and Tsao T 1997 MEMS - A technology for advancements in aerospace engineering AIAA Paper 97-0545
5. Jiang F PhD Thesis 1997 California Institute of Technology, USA
6. Jiang F, Tai Y C, Ho C M and Li W J 1994 A micromachined polysilicon hot-wire anemometer Solid-State Sensor and Actuator Workshop June 13-16
7. Jiang L, Wang Y, Wong M and Zohar Y 1998 Microchannels with suspended temperature sensors for heat transfer study Fluidics '98, Applications of Micro-Fabrication to Fluid Mechanics 1998 International Mechanical Engineering Congress and Exposition (Anaheim, CA, November 15-20) accpeted
8. Jorsh G J and Muller R S 1978 Conduction properties of lightly doped polycrystalline silicon Solid State Electron. 21 1045
9. Lu N C C, Gerzberg and Meindl J D 1978 A quantitative model of the effect of grain size on the resistivity of polycrystalline silicon resistors IEEE Electron Device Lett. 1 38
10. Mastrangelo C 1990 PhD Thesis University of California at Berkeley, CA
11. Obermeier E, Kopystynski P and Nieble R 1986 Characteristics of polysilicon layers and their application in sensors IEEE Solid-State Sensors Workshop
12. Tai Y C, Mastrangelo C H and Muller R S 1988 Thermal conductivity of LPCVD polycrystalline silicone J. Appl. Phys. 63 1442-7
13. Tai Y C and Muller R S 1985 Polysilicon bridge for anemometer application Digest Tech Paper, Transducers '85 (Philadelphia, PA, June 4-7) pp 354-7
14. _1988 Lightly doped polysilicon bridge as a flow meter Sensors Actuators 15 63-75
15. Wood M H, Muzik A, Huston H H and Hazara R 1993 Burn-in Microelectronics Manufacturing Diagnostics Handbook ed A H Landzberg (New York: Van Nostrand Reinhold)