Review of the thermal conductivity of thin films

Journal of Thermophysics and Heat Transfer

Volumn 12, Issue 2, 1998, Pages 121-131

  Mirmira, S R ^a,b,c   Fletcher, L S ^a,b,c  

^a TEXAS A AND M UNIVERSITY   (United States)

^b Mechanical Engineering Department ^*  (United States)

^c AIAA   (United States)

Author keywords

Charge separation reaction; Fullerene ions; Metastable decay; MIKE scan technique

Indexed keywords

DEPOSITION; HEAT CONDUCTION; MICROELECTRONICS; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL VARIABLES MEASUREMENT;

THERMAL CONDUCTIVITY MEASUREMENT;

THIN FILMS;

EID: 0032047475     PISSN: 08878722     EISSN: None     Source Type: Journal    
DOI: 10.2514/2.6321     Document Type: Review

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