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Thin Solid Films

Volumn 339, Issue 1-2, 1999, Pages 160-164

Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating

(3) Ju, Y S a Kurabayashi, K a Goodson, K E a

a Stanford University (United States)

Author keywords

Anisotropy; Thermal conductivity

Indexed keywords

ANISOTROPY; HEATING; OSCILLATIONS; THERMAL CONDUCTIVITY OF SOLIDS; THERMOANALYSIS; THERMOMETERS; THIN FILMS;

HARMONIC JOULE HEATING;

DIELECTRIC FILMS;

EID: 0033534934 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01328-5 Document Type: Article

Times cited : (102)

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