Synthesis and Modeling of Uniform Complex Metal Oxides by Close-Proximity Atmospheric Pressure Chemical Vapor Deposition

ACS Applied Materials and Interfaces

Volumn 7, Issue 20, 2015, Pages 10684-10694

  Hoye, Robert L Z ^a   Muñoz Rojas, David ^a,b   Musselman, Kevin P ^a,c   Vaynzof, Yana ^c,d   MacManus Driscoll, Judith L ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIV GRENOBLE ALPES   (France)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

atmospheric pressure chemical vapor deposition; bandgap tuning; multicomponent metal oxides; solar cells; spatial atmospheric atomic layer deposition; zinc magnesium oxide

Indexed keywords

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATOMIC LAYER DEPOSITION; BUBBLE FORMATION; DEPOSITION; MAGNESIUM; METALS; OPEN CIRCUIT VOLTAGE; SOLAR CELLS; SUBSTRATES; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; BAND-GAP TUNING; CHEMICAL EQUATIONS; COMPLEX METAL OXIDES; MULTICOMPONENT METAL OXIDE; POLY(3-HEXYLTHIOPHENE-2 ,5-DIYL); X-RAY DIFFRACTION MEASUREMENTS; ZINC MAGNESIUM OXIDE;

CHEMICAL VAPOR DEPOSITION;

EID: 84930622870     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am5073589     Document Type: Article

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