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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head

(3) Fitzpatrick, P Ryan a Gibbs, Zachary M a George, Steven M a

a UCB 450 (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT MOISTURE; CROSS-DIFFUSION; GAP SPACING; GAS SOURCES; MECHANICAL TOLERANCES; MODEL SYSTEM; MULTIPLE SLITS; OPERATING CONDITION; PUMPING SPEED; REACTANT GAS; RECTANGULAR CHANNEL; RESPONSE SURFACE MODELS; STEPPER MOTOR; TEST APPARATUS; TRIMETHYLALUMINUM;

ALUMINUM; ATMOSPHERIC CHEMISTRY; ATOMIC LAYER DEPOSITION; CHEMICAL VAPOR DEPOSITION; FITS AND TOLERANCES; PUMPS; SEPARATION; SUBSTRATES; VACUUM;

GASES;

EID: 84855580082 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3664765 Document Type: Article

Times cited : (29)

References (24)

1
- 75649140552
- 10.1021/cr900056b
- S. M. George, Chem. Rev. 110, 111 (2010). 10.1021/cr900056b
- (2010) Chem. Rev. , vol.110 , pp. 111
- George, S.M.¹

2
- 0002572435
- 10.1016/0040-6090(92)90874-B
- T. Suntola, Thin Solid Films 216, 84 (1992). 10.1016/0040-6090(92)90874-B
- (1992) Thin Solid Films , vol.216 , pp. 84
- Suntola, T.¹

3
- 44049087683
- Stable ZnO thin film transistors by fast open air atomic layer deposition
- DOI 10.1063/1.2924768
- D. H. Levy, D. Freeman, S. F. Nelson, P. J. Cowdery-Corvan, and L. M. Irving, Appl. Phys. Lett. 92, 192101 (2008). 10.1063/1.2924768 (Pubitemid 351713436)
- (2008) Applied Physics Letters , vol.92 , Issue.19 , pp. 192101
- Levy, D.H.¹ Freeman, D.² Nelson, S.F.³ Cowdery-Corvan, P.J.⁴ Irving, L.M.⁵

4
- 85008002412
- 10.1109/JDT.2009.2022770
- D. H. Levy, S. F. Nelson, and D. Freeman, J. Display Technol. 5, 484 (2009). 10.1109/JDT.2009.2022770
- (2009) J. Display Technol. , vol.5 , pp. 484
- Levy, D.H.¹ Nelson, S.F.² Freeman, D.³

5
- 84855571450
- U.S. patent 4,058,430 (15 November).
- T. Suntola and J. Antson, U.S. patent 4,058,430 (15 November 1977).
- (1977)
- Suntola, T.¹ Antson, J.²

6
- 79952566345
- 10.1149/1.3485280
- V. Kuznetsov, E. Granneman, P. Vermont, and K. Vanormelingen, ECS Trans. 33, 441 (2010). 10.1149/1.3485280
- (2010) ECS Trans. , vol.33 , pp. 441
- Kuznetsov, V.¹ Granneman, E.² Vermont, P.³ Vanormelingen, K.⁴

7
- 77955720046
- 10.1002/adma.201000766
- P. Poodt, A. Lankhorst, F. Roozeboom, K. Spee, D. Maas, and A. Vermeer, Adv. Mater. 22, 3564 (2010). 10.1002/adma.201000766
- (2010) Adv. Mater. , vol.22 , pp. 3564
- Poodt, P.¹ Lankhorst, A.² Roozeboom, F.³ Spee, K.⁴ Maas, D.⁵ Vermeer, A.⁶

8
- 77958487280
- 10.1063/1.3505311
- F. Werner, B. Veith, V. Tiba, P. Poodt, F. Roozeboom, R. Brendel, and J. Schmidt, Appl. Phys. Lett. 97, 162103 (2010). 10.1063/1.3505311
- (2010) Appl. Phys. Lett. , vol.97 , pp. 162103
- Werner, F.¹ Veith, B.² Tiba, V.³ Poodt, P.⁴ Roozeboom, F.⁵ Brendel, R.⁶ Schmidt, J.⁷

9
- 79952737787
- 10.1016/j.surfcoat.2011.02.009
- K. Lahtinen, P. Maydannik, P. Johansson, T. Kääriäinen, D. C. Cameron, and J. Kuusipalo, Surf. Coat. Technol. 205, 3916 (2011). 10.1016/j.surfcoat.2011.02.009
- (2011) Surf. Coat. Technol. , vol.205 , pp. 3916
- Lahtinen, K.¹ Maydannik, P.² Johansson, P.³ Kääriäinen, T.⁴ Cameron, D.C.⁵ Kuusipalo, J.⁶

10
- 79957608920
- 10.1016/j.cej.2011.03.097
- P. S. Maydannik, T. O. Kääriäinen, and D. C. Cameron, Chem. Eng. J. 171, 345 (2011). 10.1016/j.cej.2011.03.097
- (2011) Chem. Eng. J. , vol.171 , pp. 345
- Maydannik, P.S.¹ Kääriäinen, T.O.² Cameron, D.C.³

11
- 84855601458
- U.S. patent application number 2010/0189,900 (29 July).
- E. R. Dickey and W. A. Barrow, U.S. patent application number 2010/0189,900 (29 July 2010).
- (2010)
- Dickey, E.R.¹ Barrow, W.A.²

12
- 0025741912
- 10.1016/0022-0248(91)90437-A
- P. D. Dapkus, B. Y. Maa, Q. Chen, W. G. Jeong, and S. P. Denbaars, J. Cryst. Growth 107, 73 (1991). 10.1016/0022-0248(91)90437-A
- (1991) J. Cryst. Growth , vol.107 , pp. 73
- Dapkus, P.D.¹ Maa, B.Y.² Chen, Q.³ Jeong, W.G.⁴ Denbaars, S.P.⁵

13
- 84855609774
- 10.1021/am100940g
- J. S. Jur and G. N. Parsons, ACS Appl. Mater. Interfaces 3, 299 (2011). 10.1021/am100940g
- (2011) ACS Appl. Mater. Interfaces , vol.3 , pp. 299
- Jur, J.S.¹ Parsons, G.N.²

14
- 0242273200
- 10.1007/s11664-003-0095-1
- N. Takahashi, N. Yoshii, S. Nonobe, T. Nakamura, and M. Yoshioka, J. Electron. Mater. 32, 1107 (2003). 10.1007/s11664-003-0095-1
- (2003) J. Electron. Mater. , vol.32 , pp. 1107
- Takahashi, N.¹ Yoshii, N.² Nonobe, S.³ Nakamura, T.⁴ Yoshioka, M.⁵

15
- 0029184808
- 10.1016/0039-6028(95)90033-0
- A. C. Dillon, A. W. Ott, J. D. Way, and S. M. George, Surf. Sci. 322, 230 (1995). 10.1016/0039-6028(95)90033-0
- (1995) Surf. Sci. , vol.322 , pp. 230
- Dillon, A.C.¹ Ott, A.W.² Way, J.D.³ George, S.M.⁴

16
- 1242320224
- 10.1021/cm0304546
- M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George, Chem. Mater. 16, 639 (2004). 10.1021/cm0304546
- (2004) Chem. Mater. , vol.16 , pp. 639
- Groner, M.D.¹ Fabreguette, F.H.² Elam, J.W.³ George, S.M.⁴

17
- 0031553497
- 10.1016/S0040-6090(96)08934-1
- A. W. Ott, J. W. Klaus, J. M. Johnson, and S. M. George, Thin Solid Films 292, 135 (1997). 10.1016/S0040-6090(96)08934-1
- (1997) Thin Solid Films , vol.292 , pp. 135
- Ott, A.W.¹ Klaus, J.W.² Johnson, J.M.³ George, S.M.⁴

18
- 68249136905
- 10.1063/1.3159639
- P. F. Carcia, R. S. McLean, M. D. Groner, A. A. Dameron, and S. M. George, J. Appl. Phys. 106, 023533 (2009). 10.1063/1.3159639
- (2009) J. Appl. Phys. , vol.106 , pp. 023533
- Carcia, P.F.¹ McLean, R.S.² Groner, M.D.³ Dameron, A.A.⁴ George, S.M.⁵

19
- 33746306730
- 3 gas diffusion barriers grown by atomic layer deposition on polymers
- DOI 10.1063/1.2221912
- P. F. Carcia, R. S. McLean, M. H. Reilly, M. D. Groner, and S. M. George, Appl. Phys. Lett. 89, 031915 (2006). 10.1063/1.2221912 (Pubitemid 44107043)
- (2006) Applied Physics Letters , vol.89 , Issue.3 , pp. 031915
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Groner, M.D.⁴ George, S.M.⁵

20
- 31944446945
- 3 atomic layer deposition
- DOI 10.1063/1.2168489, 051907
- M. D. Groner, S. M. George, R. S. McLean, and P. F. Carcia, Appl. Phys. Lett. 88, 051907 (2006). 10.1063/1.2168489 (Pubitemid 43190860)
- (2006) Applied Physics Letters , vol.88 , Issue.5 , pp. 1-3
- Groner, M.D.¹ George, S.M.² McLean, R.S.³ Carcia, P.F.⁴

21
- 51749083229
- 10.1063/1.2975185
- J. A. Hauch, P. Schilinsky, S. A. Choulis, S. Rajoelson, and C. J. Brabec, Appl. Phys. Lett. 93, 103306 (2008). 10.1063/1.2975185
- (2008) Appl. Phys. Lett. , vol.93 , pp. 103306
- Hauch, J.A.¹ Schilinsky, P.² Choulis, S.A.³ Rajoelson, S.⁴ Brabec, C.J.⁵

22
- 2442707992
- 10.1109/JSTQE.2004.824072
- J. S. Lewis and M. S. Weaver, IEEE J. Sel. Top. Quantum Electron 10, 45 (2004). 10.1109/JSTQE.2004.824072
- (2004) IEEE J. Sel. Top. Quantum Electron , vol.10 , pp. 45
- Lewis, J.S.¹ Weaver, M.S.²

23
- 0036685058
- Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
- DOI 10.1063/1.1490410
- J. W. Elam, M. D. Groner, and S. M. George, Rev. Sci. Instrum. 73, 2981 (2002). 10.1063/1.1490410 (Pubitemid 34946326)
- (2002) Review of Scientific Instruments , vol.73 , Issue.8 , pp. 2981
- Elam, J.W.¹ Groner, M.D.² George, S.M.³

24
- 0003486756
- 7th ed. (Wiley, New York).
- D. C. Montgomery, Design and Analysis of Experiments, 7th ed. (Wiley, New York, 2008).
- (2008) Design and Analysis of Experiments
- Montgomery, D.C.¹

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