Preparation of Zn1-xMgxO films by radio frequency magnetron sputtering

Thin Solid Films

Volumn 372, Issue 1, 2000, Pages 173-176

  Minemoto, Takashi ^a   Negami, Takayuki ^b   Nishiwaki, Shiro ^b   Takakura, Hideyuki ^a   Hamakawa, Yoshihiro ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; MAGNESIA; MAGNETRON SPUTTERING; SEGREGATION (METALLOGRAPHY); SOLAR CELLS; SOLID SOLUTIONS; THIN FILMS; ZINC OXIDE;

WIDEGAP SEMICONDUCTORS;

SEMICONDUCTING FILMS;

EID: 0034273985     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01009-9     Document Type: Article

References (9)

1. T. Wada, R.D. Tomlinson (Eds.). Proceedings of the 11th International Conference on Ternary and Multinary Compounds, Salford, UK. September 8-12, 1997, p. 903.
2. J.R. Tuttle, J.S. Ward, A. Duda, T.A. Berens, M.A. Contreras, K.R. Ramanathan, A.L. Tennant, J. Keane, E.D. Cole, K. Emery, R. Noufi, D. Ginley (Eds.). Thin Films for Photovoltaic and Related Device Applications, San Francisco, USA. April 8-11, 1996, Mater. Res. Soc. Symp. Proc., 426 (1996) 143.
3. Dimmler B., Schock H.W. Prog. Photovolt. Res. Appl. 6:1998;193.
4. K. Hayashi, M. Kondo, A. Ishikawa, H. Yamagishi, J.D. Meakin (Eds.). IEEE First World Conference on Photovoltaic Energy Conversion Conference Record of the 24th IEEE Photovoltaic Specialists Conference, Hawaii, USA. Dec. 5-9, 1994, p. 674.
5. R.R. Arya, D.E. Carlson, L. Yang, L.F. Chen, F. Willing, K. Rajan, K. Jansen, J. Newton, T. Romeo, M. Konagai (Eds.). Technical Digest of the 9th International Photovoltaic Science and Engineering Conference, Miyazaki, Japan. Nov. 11-15, 1996, p. 279.
6. Birkmire R.W., Eser E. Annu. Rev. Mater. Sci. 27:1997;625.
7. Segnit E.R., Holland A.E. J. Am. Ceram. Soc. 48:1965;412.
8. Ohtomo A., Kawasaki M., Koida T., Masubuchi K., Koinuma H. Appl. Phys. Lett. 72:1998;2466.
9. Shannon R.D. Acta Cryst. A32:1976;751.