Ion exchange in ultrathin films of cu2s and zns under atomic layer deposition conditions

Chemistry of Materials

Volumn 23, Issue 20, 2011, Pages 4411-4413

  Thimsen, Elijah ^a   Peng, Qing ^a   Martinson, Alex B F ^a   Pellin, Michael J ^a   Elam, Jeffrey W ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

atomic layer deposition; Cu2S; diethyl zinc; ion exchange; sulfide; ZnS

Indexed keywords

ABSORBANCE SPECTRUM; ATOMIC LAYER; BAND-EDGE ABSORPTION; COPPER METAL; DIETHYL ZINC; ISLANDING; LOW TEMPERATURES; MASS INCREASE; METAL-ORGANIC; SULFIDE; TIME-SCALES; ULTRA-THIN; ZNO; ZNS; ZNS FILMS;

ABSORPTION SPECTROSCOPY; ATOMIC LAYER DEPOSITION; ATOMS; ION EXCHANGE; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; ULTRATHIN FILMS; ZINC; ZINC OXIDE; ZINC SULFIDE;

COPPER;

EID: 80054724589     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm201412p     Document Type: Article

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