Observing the nucleation phase of atomic layer deposition in situ

Chemistry of Materials

Volumn 24, Issue 22, 2012, Pages 4357-4362

  MacK, James F ^a,d   Van Stockum, Philip B ^b   Yemane, Yonas T ^b   Logar, Manca ^a   Iwadate, Hitoshi ^c   Prinz, Fritz B ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c HONDA RESEARCH INSTITUTE   (United States)

^d APPLIED MATERIALS INC   (United States)

Author keywords

atomic layer deposition; nucleation; scanning tunneling microscopy; zinc sulfide

Indexed keywords

AU(111) SURFACES; DEPOSITION TEMPERATURES; GRAIN MORPHOLOGIES; GRAIN SIZE; SULFIDE FILMS; TEMPERATURE DEPENDENT; TOPOGRAPHICAL OBSERVATION;

FILM GROWTH; GOLD; NUCLEATION; SCANNING TUNNELING MICROSCOPY; ZINC; ZINC SULFIDE;

ATOMIC LAYER DEPOSITION;

EID: 84870157421     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm302398v     Document Type: Article

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