메뉴 건너뛰기




Volumn 27, Issue 2, 2014, Pages 324-330

Optimization of sputtering parameters for the deposition of low resistivity indium tin oxide thin films

Author keywords

Deposition; Indium tin oxide; Parameters optimization; Sputtering

Indexed keywords

SHEET RESISTANCE; SPUTTERING; SUBSTRATES; SURFACE MORPHOLOGY; THIN FILMS; TIN; TRANSPARENCY;

EID: 84901506361     PISSN: 10067191     EISSN: 21941289     Source Type: Journal    
DOI: 10.1007/s40195-014-0048-0     Document Type: Article
Times cited : (13)

References (49)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.