Properties of indium tin oxide films prepared by rf reactive magnetron sputtering at different substrate temperature

Thin Solid Films

Volumn 322, Issue 1-2, 1998, Pages 56-62

  Meng, Li Jian ^a,b   Dos Santos, M P ^c  

^a INSTITUTO SUPERIOR DE ENGENHARIA DO PORTO   (Portugal)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

^c UNIVERSITY OF MINHO   (Portugal)

Author keywords

Indium tin oxide; Magnetron sputtering; Substrate temperature

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY MEASUREMENT; FILM PREPARATION; HIGH TEMPERATURE EFFECTS; LIGHT REFLECTION; MAGNETRON SPUTTERING; OPACITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GLASS; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

DIFFRACTION PEAKS; INDIUM TIN OXIDE (ITO) FILMS;

SEMICONDUCTING FILMS;

EID: 0032496535     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00939-5     Document Type: Article

References (21)

1. E. Kaneko, Liquid Crystal Displays, KTK Scientific, Tokyo, 1987.
2. D. Dimos, W.L. Warren, M.B. Sinclair, B.A. Tuttle, R.W. Schwartz, J. Appl. Phys. 76 (1994) 4305.
3. K. Sreenivas, J. Sudersena Rao, A. Mansingh, S. Chandra, J. Appl. Phys. 57 (1985) 384.
4. T. Maruyama, K. Fukui, J. Appl. Phys. 70 (1991) 3848.
5. J.C. Manifacier, J.P. Pillard, Thin Solid Films 77 (1981) 67.
6. P. Nath, R.F. Bunshah, Thin Solid Films 69 (1980) 63.
7. H. Kobayashi, T. Ishida, K. Nakamura, Y. Nakato, H. Tsubomura, J. Appl. Phys. 72 (1992) 5288.
8. W. Wu, B. Chiou, Appl. Surf. Sci. 68 (1993) 497.
9. C. Choi, K. No, W. Lee, H. Kim, S. Jung, W. Lee, W. Kim, S. Kim, C. Yoon, Thin Solid Films 258 (1995) 274.
10. T.J. Vink, W. Walrave, J.L.C. Daams, P.C. Baarslag, J.E.A.M. van den Meerakker, Thin Solid Films 266 (1995) 145.
11. S. Uthanna, P.S. Reddy, B.S. Naidu, P.J. Reddy, Vacuum 47 (1996) 91.
12. L.J. Meng, A. Maçarico, R. Martins, Vacuum 46 (1995) 673.
13. M. Kamei, Y. Shigesato, S. Takaki, Thin Solid Films 259 (1995) 38.
14. L.J. Meng, M. Andritschky, M.P. dos Santos, Thin Solid Films 223 (1993) 242.
15. L.J. Meng, M. Andritschky, M.P. dos Santos, Vacuum 45 (1994) 19.
16. L.J. Meng, M.P. dos Santos, Thin Solid Films 237 (1994) 112.
17. L.J. Meng, A. Azevedo, M.P. dos Santos, Materials 95-7 Encontro Nacional da Sociedade Portuguesa de Materiais, 17 a 20 de Setembro de 1995, Aveiro, Portugal, Materiais 95, Vol. 2, pp. 120-127.
18. K. Suzuki, N. Hashimoto, T. Oyama, J. Shimizu, Y. Akao, H. Kojima, Thin Solid Films 226 (1993) 104.
19. Powder Diffraction File, Joint Committee on Powder Diffraction Standards, Card 6-0416, ASTM, Philadelphia, PA, 1967.
20. D. Curie, Luminescence of Inorganic Solids, in: B. Di Bartolo (Ed.), Plenum, New York, 1978.
21. L.J. Meng, M.P. dos Santos, Thin Solid Films 289 (1996) 65.