Indium tin oxide films deposited on polyethylene naphthalate substrates by radio frequency magnetron sputtering

Thin Solid Films

Volumn 517, Issue 8, 2009, Pages 2596-2601

  Sandoval Paz, M G ^a   Ramirez Bon R ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Electrical properties and measurements; Indium tin oxide; Optical properties; Sputtering; Structural properties; X ray diffraction

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; DIFFRACTION; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; ELECTRODEPOSITION; INDIUM; LIGHT TRANSMISSION; MAGNETRONS; OPTICAL PROPERTIES; ORGANIC LIGHT EMITTING DIODES (OLED); OXIDE FILMS; PHOTOLITHOGRAPHY; PLASMA DEPOSITION; SUBSTRATES; THERMOPLASTICS; TIN; TITANIUM COMPOUNDS; X RAY ANALYSIS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE ORIENTATIONS; CUBIC CRYSTALLINE; DEPOSITION PROCESS; DEPOSITION TIME; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRICAL RESISTIVITIES; HALL MEASUREMENTS; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; OPTICAL TRANSMISSION MEASUREMENTS; OPTICAL TRANSMISSIONS; PLASTIC SUBSTRATES; POLY-CRYSTALLINE; POLYETHYLENE NAPHTHALATE; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SPUTTERING; SPUTTERING PROCESS; STRUCTURAL PROPERTIES; VAN DER PAUW METHODS; X-RAY DIFFRACTION MEASUREMENTS;

OPTICAL FILMS;

EID: 59149094044     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.10.016     Document Type: Article

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