Fabrication of thin films of ITO by aerosol CVD

Thin Solid Films

Volumn 445, Issue 2, 2003, Pages 224-228

  Maki, Kunisuke ^a   Komiya, Nobuo ^a   Suzuki, Asako ^a  

^a YOKOHAMA CITY UNIVERSITY   (Japan)

Author keywords

Aerosol CVD; Deposition process; Indium tin oxide

Indexed keywords

ACETONE; AEROSOLS; CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC WAVES; GLASS; HEATING; INDIUM COMPOUNDS; LIGHT ABSORPTION; SOL-GELS; SOLUTIONS; ULTRASONICS;

AEROSOL CVD; DEPOSITION PROCESS; INDIUM TIN OXIDES (ITO);

THIN FILMS;

EID: 1642381067     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.08.021     Document Type: Conference Paper

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