Characteristics of indium tin oxide thin films prepared using electron beam evaporation

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 115-118

  Yamaguchi, Mika ^a   Ide Ektessabi, Ari ^a   Nomura, Hiroshi ^a   Yasui, Nobuto ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Electron beam evaporation; Indium tin oxide; Ion beam irradiation

Indexed keywords

DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; INDIUM COMPOUNDS; ION BEAMS; IRRADIATION; OXYGEN; TIN; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON BEAM EVAPORATION; ION BEAM IRRADIATION;

THIN FILMS;

EID: 1342344909     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.033     Document Type: Conference Paper

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