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Thin Solid Films

Volumn 555, Issue , 2014, Pages 93-99

Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

(6) Kusayanagi, Minehide a Uchida, Azusa a Oka, Nobuto a Jia, Junjun a Nakamura, Shin Ichi a Shigesato, Yuzo a

a AOYAMA GAKUIN UNIVERSITY (Japan)

Author keywords

Al doped ZnO (AZO); Buffer layer; Crystallinity; Reactive sputtering; Strained layer; Transparent conducting oxide (TCO)

Indexed keywords

EID: 84894499461 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.10.153 Document Type: Article

Times cited : (23)

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