Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes

Thin Solid Films

Volumn 516, Issue 17, 2008, Pages 5822-5828

  Minami, Tadatsugu ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AZO; GZO; ITO; LCD; Magnetron sputtering; Thin film; Transparent conducting oxide; Transparent electrode

Indexed keywords

DEPOSITION; IMPURITIES; INDIUM COMPOUNDS; LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; SUBSTITUTION REACTIONS; THICKNESS MEASUREMENT;

RESISTIVITY STABILITY; TRANSPARENT CONDUCTING OXIDES; TRANSPARENT ELECTRODES;

THIN FILMS;

EID: 44249118332     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.063     Document Type: Article

References (43)

1. Minami T., Nanto H., and Takata S. Jpn. J. Appl. Phys. 23 (1984) L280
2. Minami T. J. Vac. Sci. Technol., A 17 (1999) 1765
3. Minami T. MRS Bull. 25 (2000) 38
4. Minami T. Semicond. Sci. Technol. 20 (2005) S35
5. T. Minami, Thin Solid Films, available online (2007).
6. Coutts T.J., Young D.L., and Li X. MRS Bull. 25 (2000) 58
7. Furubayashi Y., Hitosugi T., Yamamoto Y., Inaba K., Kinoda G., Hirose Y., Shimada T., and Hasegawa T. Appl. Phys. Lett. 86 (2005) 252101
8. Hitosugi T., Furubayashi Y., Ueda A., Itabashi K., Inaba K., Hirose Y., Kinoda G., Yamamoto Y., Shimada T., and Hasegawa T. Jpn. J. Appl. Phys. 44 (2005) L1063
9. Tabata H., and Kawai S. J. Appl. Phys. 76 (1994) 5886
10. Hartnagel H.L., Dawar A.L., Jain A.K., and Jagadish C. Semiconducting Transparent Thin Films (1995), Institute of Physics Publishing, Bristol, Philadelphia
11. Minami T., Miyata T., Ohtani Y., and Kuboi T. Phys. Status Solidi (RRL) 1 (2007) R31
12. T. Miyata, Y. Ohtani, T. Kuboi, T. Minami, Thin Solid Films available online (March 31, 2007).
13. Agura H., Suzuki A., Matsushita T., Aoki T., and Okuda M. Thin Solid Films 445 (2003) 263
14. Minami T., Oohashi K., Takata S., Mouri T., and Ogawa N. Thin Solid Films 193-194 (1990) 721
15. Malkomes N., Vergohl M., and Szyszka B. J. Vac. Sci. Technol., A 19 (2001) 414
16. Kon M., Song P.K., Shigesato Y., Frach1 P., Mizukamiand A., and Suzuki K. Jpn. J. Appl. Phys. 41 (2002) 814
17. Hirasawa H., Yoshida M., Nakamura S., Suzuki Y., Okada S., and Kondo K. Sol. Energy Mater. Sol. Cells 67 (2001) 231
18. Minami T., Ida S., and Miyata T. Thin Solid Films 416 (2002) 92
19. Shirakata S., Sakemi T., Awai K., and Yamamoto T. Superlattices Microstruct. 39 (2006) 218
20. Nanto H., Minami T., Shooji S., and Takata S. J. Appl. Phys. 55 (1984) 1029
21. Minami T., Sato H., Nanto H., and Takata S. Jpn. J. Appl. Phys. 24 (1985) L781
22. Tominaga K., Yuasa T., Kume M., and Tada O. Jpn. J. Appl. Phys. 24 (1985) 944
23. Webb J.B. Thin Solid Films 136 (1986) 135
24. Minami T., Nanto H., Sato H., and Takata S. Thin Solid Films 164 (1988) 275
25. Tominaga K., Kuroda K., and Tada O. Jpn. J. Appl. Phys. 27 (1988) 1176
26. Ichihara K., and Okubo M. Jpn. J. Appl. Phys. 33 (1994) 4478
27. Minami T., Miyata T., Yamamoto T., and Toda H. J. Vac. Sci. Technol., A 18 (2000) 1584
28. Ishibashi S., Higuchi Y., Ota Y., and Nakamura K. J. Vac. Sci. Technol., A 8 (1990) 1403
29. Utsumi K., and Kondo A. Trans. MRS Jpn. 20 (1996) 542
30. Schlott M., Kutzner M., Gehman B.L., Reger N., and Stadermann F.J. SID Int. Symp., Digest of Tech. Papers (1996) 522
31. Minami T., Suzuki S., and Miyata T. Thin Solid Films 398-399 (2001) 53
32. Cebulla R., Wendt R., and Ellmer K. J. Appl. Phys. 83 (1998) 1087
33. Minami T., Miyata T., Ohtani Y., and Mochizuki Y. Jpn. J. Appl. Phys. 45 (2006) L409
34. Minami T., Miyata T., and Ohtan Y. SID '06 Digest of Tech. Papers (2006) 470
35. Minami T., Ohtani Y., Miyata T., and Kuboi T. J. Vac. Sci. Technol. A 25 (2007) 1172
36. Minami T., Nanto H., and Takata S. Thin Solid Films 111 (1984) 167
37. Takata S., Minami T., and Nanto H. Thin Solid Films 135 (1986) 183
38. Minami T., Miyata T., and Yamamoto T. J. Vac. Sci. Technol., A 17 (1999) 1822
39. Minami T., Yamamoto T., and Miyata T. Thin Solid Films 366 (2000) 63
40. Suzuki S., Miyata T., Ishii M., and Minami T. Thin Solid Films 434 (2003) 14
41. Minami T., Sato H., Ohashi K., Tomofuji T., and Takata S. J. Cryst. Growth 117 (1992) 370
42. Minami T., Suzuki S., and Miyata T. Mater. Res. Soc. Symp. Proc. 666 (2001) F1.3.1
43. Seto J.Y.W. J. Appl. Phys. 46 (1975) 5247