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Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 640-643

High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering

(2) Guillen C a Herrero, J a

a CIEMAT (Spain)

Author keywords

Sputtering; Structure; Transparent conductive oxide (TCO)

Indexed keywords

ALUMINUM; HEATING; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTICAL PROPERTIES; SEMICONDUCTOR DOPING; STRUCTURE (COMPOSITION); ZINC OXIDE;

CERAMIC OXIDES; TRANSPARENT CONDUCTIVE OXIDE (TCO); ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 33748916974 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.12.227 Document Type: Article

Times cited : (100)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.