Highly textured zinc oxide films by room temperature ion beam assisted deposition

Physica Status Solidi - Rapid Research Letters

Volumn 3, Issue 7-8, 2009, Pages 236-238

  Kohl D ^a   Luysberg, M ^b   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELEVATED TEMPERATURE; NUCLEATION LAYERS; ROOM TEMPERATURE; SPUTTER PROCESS; STRUCTURAL INVESTIGATION; STRUCTURAL ORDERS; TEXTURED ZINC OXIDE; ZNO; ZNO FILMS;

FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION BOMBARDMENT; IONS; NUCLEATION; SEMICONDUCTING ZINC COMPOUNDS; XENON; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 71149119366     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.200903228     Document Type: Article

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