Large-area, continuous roll-to-roll nanoimprinting with PFPE composite molds

Nanotechnology

Volumn 24, Issue 50, 2013, Pages

  John, Jacob ^a,b   Tang, Yuying ^a,b   Rothstein, Jonathan P ^b   Watkins, James J ^a,b   Carter, Kenneth R ^a,b  

^a UNIVERSITY OF MASSACHUSETTS   (United States)

^b University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS MANUFACTURING; DIMENSIONAL INTEGRITY; EFFICIENCY AND RELIABILITY; ELECTRONIC DEVICE; FLEXIBLE SUBSTRATE; PATTERNING PROCESS; PERFLUOROPOLYETHERS; SUBSTRATE PREPARATION;

NANOIMPRINT LITHOGRAPHY;

MOLDS;

EID: 84889683607     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/50/505307     Document Type: Article

References (30)

1. Guo L J 2007 Nanoimprint lithography: methods and material requirements Adv. Mater. 19 495-513 (Pubitemid 46942304)
2. Costner E A, Lin M W, Jen W and Willson C G 2009 Nanoimprint lithography materials development for semiconductor device fabrication Annu. Rev. Mater. Res. 39 155-80
3. Hendricks N R and Carter K R 2012 Nanoimprint lithography of polymers Polymer Science: A Comprehensive Reference ed K Matyjaszewski and M Möller (Amsterdam: Elsevier) pp 251-74
4. Tan H, Gilbertson A and Chou Y S 1998 Roller nanoimprint lithography J. Vac. Sci. Technol. B 16 3926-9
5. Bao L R, Cheng X, Huang X D, Guo L J, Pang S W and Yee A F 2002 Nanoimprinting over topography and multilayer three-dimensional printing J. Vac. Sci. Technol. B 20 2881-6 (Pubitemid 36072526)
6. Zaumseil J, Meitl M A, Hsu J W P, Acharya B R, Baldwin K W, Loo Y L and Rogers J A 2003 Three-dimensional and multilayer nanostructures formed by nanotransfer printing Nano Lett. 3 1223-7 (Pubitemid 37206067)
7. Ahn S, Cha J, Myung H, Kim S and Kang S 2006 Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns Appl. Phys. Lett. 89 213101 (Pubitemid 44892299)
8. Ahn S H and Guo L J 2008 High-speed roll to roll nanoimprint lithography on flexible plastic substrate Adv. Mater. 20 2044-9
9. Ahn S H and Guo L J 2009 Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting ACS Nano. 25 2304-10
10. Ahn S H and Guo L J 2009 High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis Proc. SPIE 7205 720501
11. Huang T, Wu J, Yang S, Huang P and Chang S 2009 Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating Microelectron. Eng. 86 615-8
12. Stuart C and Chen Y 2009 Roll in and roll out: a path to high-throughput nanoimprint lithography ACS Nano. 3 2062-4
13. Jeans A, Almanza-Workman M, Cobene R, Elder R, Garcia R and Gomez P F 2010 Advances in roll-to-roll imprint lithography for display applications Proc. SPIE 7637 763719
14. Almanza-Workman A M, Taussig C P, Jeans A H and Cobene R L 2011 Fabrication of three-dimensional imprint lithography templates by colloidal dispersions J. Mater. Chem. 21 14185-92
15. Yun D, Son Y, Kyung J, Park H, Park C and Lee S 2012 Development of roll-to-roll hot embossing system with induction heater for micro fabrication Rev. Sci. Instrum. 83 015108
16. Inannami R, Ojima T, Matsuki K, Kono T and Nakasugi T 2012 Sub-100 nm pattern formation by roll-to-roll nanoimprint Proc. SPIE 8323 83231J
17. Dumond J J, Mahabadi K A, Yee Y S, Tan C, Fuh J Y and Lee H P 2012 High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography Nanotechnology 23 485310
18. Rolland J P, Hagberg E C, Denison G M, Carter K R and De Simone J M 2004 High-resolution soft lithography: enabling materials for nanotechnologies Angew. Chem. Int. Edn 43 5796-9 (Pubitemid 39532037)
19. Williams S S, Retterer S, Lopez R, Ruiz R, Samulski E T and DeSimone J M 2010 High-resolution PFPE-based molding techniques for nanofabrication of high-pattern density, sub-20 nm features: a fundamental materials approach Nano Lett. 10 1421-8
20. Truong T T, Lin R, Jeon S, Lee H H, Maria J and Gaur A 2007 Soft lithography using acryloxy perfluoropolyether composite stamps Langmuir 23 2898-905 (Pubitemid 46383716)
21. Rolland J P, Van D R M, Hagberg E C, Carter K R, Quake S R and DeSimone J M 2004 Functional perfluoropolyethers as novel materials for microfluidics and soft lithography Polym. Prep. 45 106-7
22. Hagberg E C, Malkoch M, Ling Y, Hawker C J and Carter K R 2007 Effects of modulus and surface chemistry of thiol-ene photopolymers in nanoimprinting Nano Lett. 7 233-7 (Pubitemid 46383576)
23. Moran I W, Briseno A L, Loser S and Carter K R 2008 Device fabrication by easy soft imprint nano-lithography Chem. Mater. 20 4595-601
24. Losic D, Mitchell J G, Lal R and Voelcker N H 2007 Rapid fabrication of micro- and nanoscale patterns by replica molding from diatom biosilica Adv. Funct. Mater. 17 2439-46 (Pubitemid 47523610)
25. Kim Y S, Lee N Y, Lim J R, Lee M J and Park S 2005 Nanofeature-patterned polymer mold fabrication toward precisely defined nanostructure replication Chem. Mater. 23 5867-70 (Pubitemid 41692246)
26. Park J, Kim Y S and Hammond P T 2005 Chemically nanopatterned surfaces using polyelectrolytes and ultraviolet-cured hard molds Nano Lett. 5 1347-50 (Pubitemid 41084415)
27. Anthony B W and Namvari K 2012 Dimensional variation of polymer substrate electrode production Proc. SPIE 8251 82510G
28. Ljubicic D M and Anthony B W 2011 3D high-speed profilometer for inspection of micro-manufactured transparent parts Proc. SPIE 8082 808211
29. Mead J, Barry C, Busnaina A and Isaacs J 2012 Metrology challenges for high-rate nanomanufacturing of polymer structures Proc. SPIE 8466 846604
30. Subbaraman H, Lin X H, Xu X C, Dodabalapur A, Guo L J and Chen R T 2012 Metrology and instrumentation challenges with high-rate, roll-to-roll manufacturing of flexible electronic systems Proc. SPIE 8466 846603