Nanoimprinting over topography and multilayer three-dimensional printing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2881-2886

  Bao, L R ^a   Cheng, X ^a   Huang, X D ^b   Guo, L J ^a   Pang, S W ^a   Yee, A F ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GLASS TRANSITION; PLASTIC FILMS; SPIN COATING; SUBSTRATES; THERMAL EFFECTS;

MULTILAYER THREE DIMENSIONAL PRINTING; NANIMPRINTING; PLANARIZATION;

NANOTECHNOLOGY;

EID: 0036873980     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1526355     Document Type: Article

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