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Journal of Materials Chemistry

Volumn 21, Issue 37, 2011, Pages 14185-14192

Fabrication of three-dimensional imprint lithography templates by colloidal dispersions

(4) Almanza Workman, A Marcia a Taussig, Carl P b Jeans, Albert H b Cobene, Robert L b

a Phicot Inc (United States)

b HEWLETT PACKARD COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D MASKS; AIR BUBBLES; CAPILLARY STRESS; CHEMICAL COMPATIBILITY; COLLOIDAL DISPERSION; FLEXIBLE SUBSTRATE; GEOMETRY INFORMATION; HARD SPHERES; IMPRINT LITHOGRAPHY; LOW COSTS; LOW GAS PERMEABILITY; ONE-FACTOR; POROUS PACKINGS; SELF-ALIGNED; SOFT MOLD; STAMP MATERIALS; SUBMICRON-SIZED; THIN FILM STACKS; WATER EVAPORATION;

AIR PERMEABILITY; DISPERSIONS; ELASTOMERS; FLUORINE CONTAINING POLYMERS; GAS PERMEABILITY; SUBSTRATES; THREE DIMENSIONAL; USER INTERFACES;

NANOIMPRINT LITHOGRAPHY;

EID: 80052527625 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c1jm10848d Document Type: Article

Times cited : (13)

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