Advances in roll-to-roll imprint lithography for display applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7637, Issue , 2010, Pages

  Jeans, Albert ^a   Almanza Workman, Marcia ^b   Cobene, Robert ^a   Elder, Richard ^a   Garcia, Robert ^b   Gomez Pancorbo, Fernando ^a   Jackson, Warren ^a   Jam, Mehrban ^a   Kim, Han Jun ^b   Kwon, Ohseung ^b   Luo, Hao ^a   Maltabes, John ^a   Mei, Ping ^a   Perlov, Craig ^a   Smith, Mark ^a   Taussig, Carl ^a   Jeffrey, Frank ^c   Braymen, Steve ^c   Hauschildt, Jason ^c   Junge, Kelly ^c   Larson, Don ^c   Stieler, Dan ^c   more..

^a HEWLETT PACKARD COMPANY   (United States)

^b Phicot Inc   (United States)

^c PowerFilm Inc   (United States)

Author keywords

imprint lithography; R2R; roll to roll; SAIL; self aligned imprint lithography

Indexed keywords

3-DIMENSIONAL; ACTIVE MATRIXES; BACKPLANES; BLANKET MATERIALS; DISPLAY APPLICATION; FLEXIBLE SUBSTRATE; IMPRINT LITHOGRAPHY; LAYER ALIGNMENT; MULTI-LEVEL; ROLL TO ROLL; SELF-ALIGNED; TRANSISTOR ARRAYS; UNDERLYING LAYERS;

POLYIMIDES; TRANSISTORS;

NANOIMPRINT LITHOGRAPHY;

EID: 77953309419     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.852268     Document Type: Conference Paper

References (4)

1. Kim, H-J., Almanza-Workman, M., Garcia, B., Kwon, O., Jeffrey, F., Braymen, S., Hauschildt, J., Junge, K., Larson, D., Stieler, D., Chaiken, A., Cobene, B., Elder, R., Jackson, W. B., Jam, M., Jeans, A., Luo, H., Mei, P., Perlov, C. and Taussig, C., "Roll-to-roll manufacturing of electronics on flexible substrates using self-aligned imprint lithography (SAIL)," J. Soc. Inf. Display 17 963 (2009).
2. Taussig, C. et al., "Progress on R2R manufactured backplanes using self-aligned imprint lithography (SAIL)," Proc. 8th Annual Flexible Electronics & Displays Conference (2009).
3. Jeans, A., "Method of replicating a high resolution three-dimensional pattern on a compliant media of arbitrary size," U. S. Patent No. 6808646(B1) (2004).
4. Xia, Y. and Whitesides, G. M., "Soft Lithography," Ann. Rev. Mater. Sci. 28, 153-84 (1998).