Dimensional variation of polymer substrate electrode production

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8251, Issue , 2012, Pages

  Anthony, Brian W ^a   Namvari, Kasra ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b ATKearney ^*  (United States)

Author keywords

electrodes; image analysis; manufacturing; microfluidics; polymer; variation

Indexed keywords

CRITICAL DIMENSION; DIMENSIONAL VARIATIONS; ELECTRODE DIMENSIONS; HIGH RESOLUTION IMAGE; INTER-DIGITATED ELECTRODES; MANUFACTURING PROCESS; MICRO-FLUIDIC DEVICES; OPTICAL IMAGING; POLYMER (SOLID); POLYMER SUBSTRATE; VARIATION;

BIOMEMS; ELECTRIC PROPERTIES; ELECTRODES; IMAGE ANALYSIS; MANUFACTURE; MICROFLUIDICS; MICROSYSTEMS;

FUNCTIONAL POLYMERS;

EID: 84859023462     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.908812     Document Type: Conference Paper

References (6)

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3. Linares, R., 2010 "Manufacturability of Lab on a Chip Devices: Tolerance Analysis and Requirements Establishment", M.Eng. Thesis, Massachusetts Institute of Technology, Cambridge, MA.
4. http://www.mathworks.com/products/matlab/index.html
5. http://itl.nist.gov/div898/handbook/mpc/section2/mpc221.htm
6. Holmes, J. and Anthony, B. W., "Robustness and repeatability test of interdigitated electrodes on a polymer substrate in an aqueous environment", Proc. SPIE 8251, (2012).