3D high-speed profilometer for inspection of micro-manufactured transparent parts

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8082, Issue , 2011, Pages

  Ljubicic, Dean M ^a   Anthony, Brian W ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

3D imaging; Depth from focus; High speed profilometer; Micro manufacturing; Polymer; Transparent

Indexed keywords

3D IMAGING; DEPTH FROM FOCUS; MICRO-MANUFACTURING; PROFILOMETERS; TRANSPARENT;

INSPECTION; INSTRUMENTS; OPTICAL DATA PROCESSING; OPTICAL SYSTEMS; OPTICAL VARIABLES MEASUREMENT; POLYMERS; PROFILOMETRY; STATISTICAL PROCESS CONTROL; THREE DIMENSIONAL;

OPTICAL TESTING;

EID: 84861078894     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.889564     Document Type: Conference Paper

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