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Volumn 549, Issue , 2013, Pages 184-191

Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Author keywords

HIPIMS; Hollow cathode; Sputtering; Thin films

Indexed keywords

CRYSTALLINE STRUCTURE; DEPOSITION METHODS; HIPIMS; HOLLOW CATHODES; MAGNETIC FIELD ELECTRONS; PULSED HOLLOW CATHODES; QUARTZ CRYSTAL MONITORS; SPUTTERING SYSTEMS;

EID: 84888639315     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.09.031     Document Type: Conference Paper
Times cited : (45)

References (33)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.