Linear arc discharge source for large area plasma processing

Applied Physics Letters

Volumn 70, Issue 5, 1997, Pages 577-579

  Bardos L ^a   Barankova H ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000991175     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118210     Document Type: Article

References (16)

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