Generalized ellipsometry characterization of sculptured thin films made by glancing angle deposition

Ellipsometry at the Nanoscale

Volumn , Issue , 2013, Pages 341-410

  Schmidt, Daniel ^a   Schubert, Eva ^a   Schubert, Mathias ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC MEDIA; ANISOTROPY; DEPOSITION; DIELECTRIC PROPERTIES; DIELECTRIC PROPERTIES OF SOLIDS; ELLIPSOMETRY; OPTICAL PROPERTIES; THIN FILMS;

ANISOTROPIC DIELECTRICS; DEPOLARIZATION FACTOR; EFFECTIVE MEDIUM APPROXIMATION; GENERALIZED ELLIPSOMETRY; GEOMETRICAL STRUCTURE; GLANCING ANGLE DEPOSITION; NANOSTRUCTURED THIN FILM; OPTICAL CHARACTERIZATION TECHNIQUE;

OPTICAL FILMS;

EID: 84883890176     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-642-33956-1     Document Type: Chapter

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