Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 571-575

  Podraza, N J ^a   Chen, Chi ^a   An, Ilsin ^a   Ferreira, G M ^a   Rovira, P I ^a   Messier, R ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Anisotropic thin films; Chiral thin films; Form birefringence; Optical rotation; Sculptured thin films; Spectroscopic Mueller matrix ellipsometry

Indexed keywords

ANISOTROPY; BIREFRINGENCE; COMPUTATIONAL METHODS; COMPUTER SIMULATION; DATA REDUCTION; ELLIPSOMETRY; LIGHT REFLECTION; LIGHT TRANSMISSION; MATRIX ALGEBRA; OPTICAL ROTATION; PHOTONS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; STEREOCHEMISTRY;

ANISOTROPIC THIN FILMS; CHIRAL THIN FILMS; FORM BIREFRINGENCE; SCULPTED THIN FILMS; SPECTROSCOPIC MUELLER MATRIX ELLIPSOMETRY;

THIN FILMS;

EID: 17144438208     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.219     Document Type: Conference Paper

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