SCOPUS 정보 검색 플랫폼

Optical Materials

Volumn 32, Issue 9, 2010, Pages 1146-1153

Optical anisotropy of tilted columns thin films of chromium deposited at oblique incidence

(6) Mansour, M a Keita, A S a Gallas, B a Rivory, J a Besnard, A b Martin, N b

a INSTITUT DES NANOSCIENCES DE PARIS (France)

b CNRS (France)

Author keywords

Ellipsometry; GLAD; Metallic thin films

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELLIPSOMETRY; OPTICAL PROPERTIES; SURFACE TOPOGRAPHY; THIN FILMS; TOPOGRAPHY;

CHROMIUM THIN FILMS; ELLIPSOMETRIC MEASUREMENTS; GLAD; METALLIC THIN FILMS; OBLIQUE INCIDENCE; OFF-DIAGONAL ELEMENTS; OUT-OF-PLANE ANISOTROPY; SILICON SUBSTRATES;

OPTICAL FILMS;

EID: 84859087320 PISSN: 09253467 EISSN: None Source Type: Journal
DOI: 10.1016/j.optmat.2010.03.022 Document Type: Article

Times cited : (23)

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