Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide, titanium oxide, and zirconium oxide

Applied Optics

Volumn 37, Issue 13, 1998, Pages 2653-2659

  Hodgkinson, Ian ^a   Wu, Qi Hong ^a   Hazel, Judith ^a  

^a UNIVERSITY OF OTAGO   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000087967     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.002653     Document Type: Article

References (21)

1. T. Motohiro and Y. Taga, “Thin film retardation plate by oblique deposition, ” Appl. Opt. 28, 2466-2482 (1989).
2. R. M. A. Azzam, “PIE: perpendicular-incidence ellipsometry-application to the determination of the optical properties of uniaxial and biaxial absorbing crystals, ” Opt. Commun. 19, 122-124 (1976).
3. Q. H. Wu and I. J. Hodgkinson, “Transmission-mode perpendicular incidence ellipsometry of anisotropic thin films, ” J. Opt. 25, 43-49 (1994).
4. Q. H. Wu and I. J. Hodgkinson, “Materials for birefringent coatings, ” Opt. Photon. News 5(5), S9-S10 (1994).
5. A. Zuber, H. Janchen, and N. Kaiser, “Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films, ” Appl. Opt. 35, 5553-5556 (1996).
6. H. Wang, “Determination of optical constants of absorbing crystalline thin films from reflectance and transmittance measurements with oblique incidence, ” J. Opt. Soc. Am. A 11, 2331-2337 (1994).
7. I. J. Hodgkinson, F. Horowitz, H. A. Macleod, M. Sikkens, and J. J. Wharton, “Measurement of the principal refractive indices of thin films deposited at oblique incidence, ” J. Opt. Soc. Am. A 2, 1693-1697 (1985).
8. F. Horowitz and H. A. Macleod, “Determination of principal refractive indices of birefringent films, ” in Optical Interference Coatings, Vol. 6 of 1988 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1988), pp. 203-206.
9. E. Pelletier, F. Flory, and Y. Hu, “Optical characterization of thin films by guided waves, ” Appl. Opt. 28, 2918-2924 (1989).
10. 2 films, ” Appl. Opt. 32, 5649-5659 (1993).
11. 2 birefringent films, ” Appl. Opt. 33, 2659-2663 (1994).
12. H. Janchen, D. Endelema, N. Kaiser, and F. Flory, “Determination of the refractive indices of highly biaxial anisotropic coatings using guided modes, ” Pure Appl. Opt. 5, 405-415 (1996).
13. I. J. Hodgkinson, J. C. Hazel, and Q. H. Wu, “In situ measurement of principal refractive indices of thin films by two-angle ellipsometry, ” Thin Solid Films 313-314, 368-372 (1998).
14. I. J. Hodgkinson, J. C. Hazel, and Q. H. Wu, “Real-time monitoring of principal refractive indices during the growth of biaxial films, ” paper WR2 presented at 1997 OSA Annual Meeting (Optical Society of America, Washington, D.C., 1997).
15. M. Born and E. Wolf, Principles of Optics (Pergamon, London, 1959).
16. 5 for optical interference coatings, ” J. Vac. Sci. Technol. 18, 1303-1305 (1981).
17. 2 films produced by reactive evaporation of various titanium-oxygen phases, ” Appl. Opt. 15, 2986-2991 (1976).
18. R. E. Klinger and C. K. Carniglia, “Optical and crystalline inhomogeneity in evaporated zirconia films, ” Appl. Opt. 24, 3184-3187 (1985).
19. T. Muller and H. K. Pulker, “Thin film morphology in TEM as revealed by heat-shock fracturing and replication of film cross sections, ” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE 2253, 584-595 (1994).
20. J. M. Nieuwenhuizen and H. B. Haanstra, “Microfractography of thin films, ” Philips Tech. Rev. 27, 87-91 (1966).
21. I. J. Hodgkinson, Q. H. Wu, A. J. McPhun, and C. B. Rawle, “PS sampler-design, deposition and monitoring of anisotropic coatings, ” in Annual Meeting, Vol. ILS-XIII (Optical Society of America, Washington, D.C., 1997), paper WR3.