Quasi-periodic nanostructures grown by oblique angle deposition

Journal of Applied Physics

Volumn 94, Issue 12, 2003, Pages 7723-7728

  Karabacak, T ^a   Wang, G C ^a   Lu, T M ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OBLIQUE ANGLE DEPOSITION; POWER SPECTRAL DENSITY (PSD);

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DIFFUSION; FREQUENCIES; GROWTH (MATERIALS); METALLIC FILMS; MORPHOLOGY; PRESSURE EFFECTS; SPUTTER DEPOSITION; SURFACES; TUNGSTEN;

NANOSTRUCTURED MATERIALS;

EID: 0347566226     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1621717     Document Type: Article

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