Characterization of inclined GaSb nanopillars by Mueller matrix ellipsometry

Journal of Applied Physics

Volumn 108, Issue 1, 2010, Pages

  Nerbo I S ^a   Le Roy, S ^b,c   Foldyna, M ^c   Kildemo, M ^a   Sondergrd E ^b,c  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

^b SAINT GOBAIN RECHERCHE   (France)

^c LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTH ANGLES; AZIMUTH ORIENTATION; EFFECTIVE MEDIUM MODEL; IN-SITU OBSERVATIONS; INCLINATION ANGLES; ION SPUTTERING; LOW ENERGIES; MUELLER; MUELLER MATRIX; MUELLER MATRIX ELLIPSOMETRY; NANOPILLARS; OPTICAL CHARACTERIZATION; OPTICAL MODELS; SCANNING ELECTRONS; SINGLE WAVELENGTH;

ANISOTROPIC MEDIA; ELLIPSOMETRY; GALLIUM ALLOYS; OPTICAL PROPERTIES; PLANTS (BOTANY); SPUTTERING;

SCANNING ELECTRON MICROSCOPY;

EID: 77955189910     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3386460     Document Type: Article

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