Nanostructured metal oxide thin films for humidity sensors

IEEE Sensors Journal

Volumn 8, Issue 8, 2008, Pages 1422-1429

  Steele, John J ^a,b   Taschuk, Michael T ^a,b   Brett, Michael J ^a,b,c  

^a IEEE

^b UNIVERSITY OF ALBERTA   (Canada)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition (GLAD); Humidity; Metal oxide; Model development; Nanostructured; Porous; Sensor; Thin film

Indexed keywords

DETECTORS; HUMIDITY SENSORS; METALLIC COMPOUNDS; METALLIZING; METALS; METEOROLOGY; MOISTURE; OPTICAL DESIGN; OXIDE FILMS; THICK FILMS;

CAPACITIVE HUMIDITY SENSORS (CHS); INTERDIGITATED ELECTRODES (IDE); METAL OXIDE THIN FILMS; NANO-STRUCTURED;

SENSORS;

EID: 47849123411     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.920715     Document Type: Article

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