Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

Optics Letters

Volumn 34, Issue 7, 2009, Pages 992-994

  Schmidt, D ^a   Booso, B ^b   Hofmann, T ^a   Schubert, E ^a   Sarangan, A ^b   Schubert, M ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b UNIVERSITY OF DAYTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; CHROMIUM; DICHROISM; ELLIPSOMETRY; FILMS; INTERFACES (MATERIALS); OPTICAL CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS;

ABSORBING MATERIALS; COLUMNAR THIN FILMS; FILM INTERFACES; GENERALIZED ELLIPSOMETRY; GLANCING ANGLE DEPOSITION; INDUCED BIREFRINGENCE; OPTICAL DISPERSION; SURFACE NORMALS;

OPTICAL FILMS;

EID: 66349132492     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.000992     Document Type: Article

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