Ex situ ellipsometric investigation of nanocolumns inclination angle of obliquely evaporated silicon thin films

Applied Physics Letters

Volumn 87, Issue 15, 2005, Pages 1-3

  Beydaghyan, Gisia ^a   Buzea, Cristina ^a   Cui, Yan ^a   Elliott, Chelsea ^a   Robbie, Kevin ^a  

^a QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ELLIPSOMETRY; SILICON; THIN FILMS;

NANOCOLUMNS INCLINATION ANGLE; SILICON THIN FILMS;

NANOSTRUCTURED MATERIALS;

EID: 28344438089     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2084329     Document Type: Article

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