Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors

Sensors and Actuators, A: Physical

Volumn 199, Issue , 2013, Pages 98-105

  Nguyen, Minh Duc ^a,b,c   Dekkers, Matthijn ^b,c   Vu, Hung Ngoc ^a   Rijnders, Guus ^b  

^a HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c SolMateS BV   (Netherlands)

Author keywords

Film composition; Film thickness; Mass sensitivity; Piezoelectric thin film cantilever; Transverse piezoelectric coefficient

Indexed keywords

COMPOSITION DEPENDENCE; FERROELECTRIC PROPERTY; FILM COMPOSITION; MASS-SENSITIVITY; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC COEFFICIENT; REMNANT POLARIZATIONS; TRANSVERSE PIEZOELECTRIC COEFFICIENTS;

EPITAXIAL FILMS; EPITAXIAL GROWTH; FILM THICKNESS; NANOCANTILEVERS; OPTIMIZATION; PHASE DIAGRAMS; POLARIZATION; THIN FILMS;

PIEZOELECTRICITY;

EID: 84879213260     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.05.004     Document Type: Article

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