Preparation and properties of piezoelectric lead zirconate titanate thin films for microsensors and microactuators by sol-gel processing

Journal of the Ceramic Society of Japan

Volumn 104, Issue 3, 1996, Pages 159-163

  Tuchiya, Toshiyuki ^a,b   Itoh, Toshihiro ^a   Sasaki, Gen ^a,c   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Rd Management Section   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Crack free films; Microactuator; Microsensor; Piezoelectric properties; PZT; Sol gel processing; Thin film

Indexed keywords

ACETIC ACID; ADDITIVES; CHEMICAL OPERATIONS; ELASTIC MODULI; ETCHING; FERROELECTRIC MATERIALS; MICROSTRUCTURE; PERMITTIVITY; PIEZOELECTRICITY; POLARIZATION; RESIDUAL STRESSES; THIN FILMS;

CRACK FREE FERROELECTRIC THIN FILMS; ETHYLENE GLYCOL; ISLANDLIKE PEROVSKITE REGION; LEAD ACETATE; LEAD ZIRCONATE TITANATE; MICROACTUATOR; MICROSENSOR; SOL-GEL PROCESSING; TITANIUM ISOPROPOXIDE; ZIRCONIUM BUTOXIDE;

LEAD COMPOUNDS;

EID: 0030110294     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.104.159     Document Type: Article

References (15)

1. A. Okada, J. Appl. Phys., 49, 4495-99 (1978).
2. S. B. Krupanidhi, N. Maffei, M. Sayer and K. El-Assal, J. Appl. Phys., 54, 6601-09 (1983).
3. R. N. Castellano and L. G. Feinstein, J. Appl. Phys., 50, 4406-11 (1979).
4. M. Oikawa and K. Toda, Appl. Phys. Lett., 29, 491-92(1976).
5. C. A. Paz de Araujo, L. D. McMillan, B. M. Melnick, J. D. Cuchiaro and J. F. Scott, Ferroelectrics, 104, 241-56 (1990).
6. Y. Takahashi, Y. Matsuoka, K. Yamaguchi, M. Matsuki and K. Kobayashi, J. Mater. Sci., 25, 3960-64 (1990).
7. N. Tohge, S. Takahashi and T. Minami, J. Am. Ceram. Soc., 74, 67-71 (1991).
8. K. D. Budd, S. K. Dey and D. A. Payne, Br. Ceram. Proc., 36, 107-21 (1985).
9. G. Yi, Z. Wu and M. Sayer, J. Appl. Phys., 64, 2717-24 (1988).
10. S. P. Timoshenko and S. W.-Kriger, "Theory of Plates and Shells", McGraw-Hill (1959).
11. T. Tsuchiya, T. Itoh and T. Suga (unpublished).
12. A. H. Carim, B. A. Tuttle, D. H. Doughty and S. L. Martinez, J. Am. Ceram. Soc., 74, 1455-58 (1991).
13. C. D. E. Lakeman and D. A. Payne, J. Am. Ceram. Soc., 75, 3091-96 (1992).
14. R. J. Jaccodine and W. A. Schlegel, J. Appl. Phys., 37, 2429-34 (1966).
15. K. Okazaki and K. Nagata, J. Am. Ceram. Soc., 56, 82-86 (1973).