Residual stress analysis of all perovskite oxide cantilevers

Journal of Electroceramics

Volumn 27, Issue 3-4, 2011, Pages 176-188

  Vasta, Giuseppe ^a   Jackson, Timothy J ^a   Frommhold, Andreas ^a   Bowen, James ^a   Tarte, Edward J ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Cantilever; Residual stress; Thermal stress; Thin film stress

Indexed keywords

ANCHOR POINT; CANTILEVER; FILM DEPOSITION; FREE END; LARGE DEFLECTION; PEROVSKITE OXIDES; PIEZOELECTRIC CANTILEVERS; RADIUS OF CURVATURE; SEM IMAGE; SUSPENDED BEAMS; THERMAL EXPANSION COEFFICIENTS; THIN FILM MULTILAYERS; THIN FILM STRESS;

BARIUM COMPOUNDS; FILM PREPARATION; LATTICE MISMATCH; PEROVSKITE; RESIDUAL STRESSES; STRESS ANALYSIS; THERMAL EXPANSION; THERMAL STRESS; THIN FILMS; VAPOR DEPOSITION;

NANOCANTILEVERS;

EID: 84655166922     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-011-9663-6     Document Type: Article

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