Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 9 B, 2003, Pages 6139-6142

  Shin, Sanghun ^a   Song, Sangguen ^a   Lee, Youngsik ^a   Lee, Naeung ^a   Park, Joonshik ^b   Park, Hyoderk ^b   Lee, Jaichan ^a  

^a Sungkyunkwan University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

MEMS; Microcantilever; PZT; Resonant frequency

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; NUMERICAL ANALYSIS; SYSTEMS ANALYSIS;

MASS SENSITIVITY; NANOBALANCE; PIEZOELECTRIC MICROCANTILEVER;

PIEZOELECTRIC DEVICES;

EID: 0344741449     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6139     Document Type: Article

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