Sol-Gel derived Pb(Zr,Ti)O3 thin films: Residual stress and electrical properties

Journal of the European Ceramic Society

Volumn 25, Issue 12 SPEC. ISS., 2005, Pages 2247-2251

  Ong, R J ^a   Berfield, T A ^a   Sottos, N R ^a   Payne, D A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Dielectric properties; Films; Piezoelectric properties; PZT; Sol Gel processes

Indexed keywords

ELECTRIC PROPERTIES; PERMITTIVITY; PIEZOELECTRICITY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SOL-GELS; STRAIN;

DEFORMABLE MATERIALS; FILM THICKNESS; PHASE FORMATION; SPIN CASTING;

THIN FILMS;

PIEZOELECTRICITY;

EID: 20444445110     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.03.103     Document Type: Article

References (23)

1. A.J. Moulson and J.M. Herbert Electroceramics: Materials, Properties, Applications 1990 Chapman and Hall London
2. B. Jaffe W.R. Cook and H. Jaffe Piezoelectric Ceramics 1971 Academic Press London
3. S. Buhlmann B. Dwir J. Baborowski and P. Muralt Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size Appl. Phys. Lett. 80 2002 3195-3197
4. 3 thick films on (1 0 0)Si substrates by metalorganic chemical vapor deposition and their electrical properties Jpn. J. Appl. Phys. 41 2002 6705-6708
5. 3 films prepared by pulsed laser deposition Jpn. J. Appl. Phys. 41 2002 3817-3821
6. Y.L. Tu M.L. Calzada N.J. Phillips and S.J. Milne Synthesis and electrical characterization of thin films of PT and PZT made from a diol-based sol-gel route J. Am. Ceram. Soc. 79 1996 441-448
7. 3, PZT, and PLZT thin films Proc. Br. Ceram. Soc. 36 1985 107-121
8. C.D.E. Lakeman and D.A. Payne Apparent thickness effect on properties of ferroelectric PZT thin layers Ferroelectrics 152 1994 145-150
9. Z. Surowiak M.F. Kupriyanov and D. Czekaj Properties of nanocrystalline ferroelectric PZT ceramics J. Eur. Ceram. Soc. 21 2001 1377-1381
10. H.Z. Jin and J. Zhu Size effect and fatigue mechanism in ferroelectric thin films J. Appl. Phys. 92 2002 4594-4598
11. X.H. Du J. Zheng U. Belegundu and K. Uchino Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary Appl. Phys. Lett. 72 1998 2421-2423
12. 3 thin films J. Appl. Phys. 94 2003 5210-5219
13. C.D.E. Lakeman and D.A. Payne Processing effects in the sol-gel preparation of PZT dried gels, powders, and ferroelectric thin layers J. Am. Ceram. Soc. 75 1992 3091-3096
14. T. Tani and D.A. Payne Lead oxide coatings on sol-gel-derived lead lanthanum zirconium titanate thin layers for enhanced crystallization into the perovskite structure J. Am. Ceram. Soc. 77 1994 1242-1248
15. R.J. Ong and D.A. Payne Densification and stress development for the chemical-solution deposition of PZT thin layers on silicon In IEEE International Symposium on Applications of Ferroelectrics 2000 pp.340-397
16. G.G. Stoney The tension of metallic films deposited by electrolysis Proc. R. Soc. London A 82 1909 172-175
17. L. Lian and N.R. Sottos Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films J. Appl. Phys. 87 2000 3941-3949
18. S.S. Sengupta S.M. Park D.A. Payne L.H. Allen and Origins Evolution of stress development in sol-gel derived thin layers and multideposited coatings of lead titanate J. Appl. Phys. 83 1998 2291-2296
19. T.A. Berfield N.R. Sottos R.J. Ong D.A. Payne Residual stress effects in ferroelectric thin films In Materials Research Society Symposium Proceedings 2003 pp.29-34
20. A.L. Kholkin C. Wutchrich D.J. Taylor and N. Setter Interferometric measurements of electric field-induced displacements in piezoelectric thin films Rev. Scient. Instrum. 67 1996 1935-1941
21. J.F. Shepard Jr. S. Trolier-McKinstry M.A. Hendrickson and R. Zeto Properties of PZT thin films as a function of in-plane biaxial stress ISAF '96. Proc. of the 10th IEEE Int. Symp. on the Applications of Ferroelectrics 1996 pp.161-165
22. T.J. Garino and H.M. Harrington Residual stress in PZT thin films and its effect on ferroelectric properties Ferroelectric Thin Films II Symposium. Mater. Res. Soc. (Materials Research Society Symposiums Proceedings) 1992 pp.341-347
23. G.L. Brennecka W. Huebner B.A. Tuttle and P.G. Clem Use of stress to produce highly oriented tetragonal lead zirconate titanate (PZT 40/60) thin films and resulting electrical properties J. Am. Ceram. Soc. 87 2004 1459-1465